发明授权
- 专利标题: Coating apparatus, coating method and coating-film forming apparatus
- 专利标题(中): 涂布装置,涂布方法和涂膜成膜装置
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申请号: US13364739申请日: 2012-02-02
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公开(公告)号: US08449945B2公开(公告)日: 2013-05-28
- 发明人: Seiji Ohishi , Akihiko Nakamura
- 申请人: Seiji Ohishi , Akihiko Nakamura
- 申请人地址: JP Kanagawa
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Carrier Blackman & Associates, P.C.
- 代理商 Joseph P. Carrier; William D. Blackman
- 优先权: JP2004-344819 20041129
- 主分类号: B05D3/12
- IPC分类号: B05D3/12
摘要:
A coating method, which uses a coating apparatus including a rotatable tray having a recessed portion for accommodating a substrate and rotatable together with the substrate, a nozzle for supplying a coating liquid, and an applicator for spreading the coating liquid, includes the steps of placing a substrate into the recessed portion of the tray, positioning the nozzle over a non-recessed portion of the upper surface of the tray, supplying a coating liquid from the nozzle, and forming a coating liquid pool only on the non-recessed portion of the upper surface of the tray, moving the applicator in a horizontal direction while maintaining a certain distance with respect to the upper surface of the substrate for spreading the coating liquid of the coating liquid pool over the entire upper surface of the substrate, and releasing the substrate from the recessed portion of the tray.
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