发明授权
- 专利标题： Integrated circuit with grating and manufacturing method therefor
- 专利标题（中）： 具有光栅的集成电路及其制造方法
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申请号： US13119370申请日： 2009-09-12
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公开(公告)号： US08450823B2公开(公告)日： 2013-05-28
- 发明人: Erwin Hijzen , Magali Lambert
- 申请人： Erwin Hijzen , Magali Lambert
- 申请人地址： NL Eindhoven
- 专利权人： NXP B.V.
- 当前专利权人： NXP B.V.
- 当前专利权人地址： NL Eindhoven
- 优先权： EP08105358 20080916
- 国际申请： PCT/IB2009/053994 WO 20090912
- 国际公布： WO2010/032187 WO 20100325
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232 ; H01L21/00
摘要：
Disclosed is an integrated circuit (100) comprising a substrate (110) carrying a plurality of light-sensitive elements (112) and a blazed grating (120) comprising a plurality of diffractive elements (122) for diffracting respective spectral components (123-125) of incident light (150) to respective light-sensitive elements (112), the blazed grating (120) comprising a stack of layers, at least some of these layers comprising first portions, e.g. metal portions (202, 222, 242) arranged such that each diffractive element (122) comprises a stepped profile of stacked first portions with a first portion in a higher layer laterally extending beyond a first portion in a lower layer of said stepped profile.
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