发明授权
US08454752B2 Foreign substance removing apparatus, foreign substance removing method, and storage medium 有权
异物去除装置,异物去除方法和存储介质

Foreign substance removing apparatus, foreign substance removing method, and storage medium
摘要:
A foreign substance removing apparatus includes a mounting table for mounting and rotating a substrate; and a laser beam irradiation unit for removing foreign substances attached to a surface of the substrate by irradiating foreign substance cleaning laser beam onto the substrate mounted and rotated on the mounting table. In the foreign substance removing apparatus, the laser beam irradiation unit irradiates laser beam having an elongate shaped irradiation cross section onto the surface of the substrate.
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