Invention Grant
- Patent Title: Spectrometric process monitoring
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Application No.: US12387643Application Date: 2009-05-05
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Publication No.: US08456633B2Publication Date: 2013-06-04
- Inventor: E. Neil Lewis , Kenneth S. Haber
- Applicant: E. Neil Lewis , Kenneth S. Haber
- Applicant Address: US MA Westborough
- Assignee: Malvern Instruments Incorporated
- Current Assignee: Malvern Instruments Incorporated
- Current Assignee Address: US MA Westborough
- Agent Kristofer E. Elbing
- Main IPC: G01N21/25
- IPC: G01N21/25

Abstract:
Spectrometric apparatus that include an array of detector elements and exhibits a number of capabilities is disclosed. The elements can be responsive to incident radiation to produce an output signal that includes information from the incident radiation. A spectrally selective element can be located in an optical path between the radiation source and the array, with an analysis module responsive to the output signal operative to analyze spatial distribution of spectral information received by the array. The apparatus can also correct for differences in intensity and spectral variability for spectral image signals and/or compare the spectral image signals with a pattern in spatial-spectral coordinate space. Detector elements can be responsive to scattering, and spatial information in their output can be analyzed.
Public/Granted literature
- US20100097599A1 Spectrometric process monitoring Public/Granted day:2010-04-22
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