发明授权
- 专利标题: Process for fabricating patterned magnetic recording device
- 专利标题(中): 制造图案化磁记录装置的方法
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申请号: US12768616申请日: 2010-04-27
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公开(公告)号: US08460565B2公开(公告)日: 2013-06-11
- 发明人: Kim Y Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S Kuo , Dieter K Weller
- 申请人: Kim Y Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S Kuo , Dieter K Weller
- 申请人地址: US CA Cupertino
- 专利权人: Seagate Technology LLC
- 当前专利权人: Seagate Technology LLC
- 当前专利权人地址: US CA Cupertino
- 代理机构: Ladas & Parry LLP
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
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