发明授权
- 专利标题: Methods and apparatus for thinning, testing and singulating a semiconductor wafer
- 专利标题(中): 减薄,测试和分割半导体晶片的方法和装置
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申请号: US13292037申请日: 2011-11-08
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公开(公告)号: US08461024B2公开(公告)日: 2013-06-11
- 发明人: Morgan T. Johnson
- 申请人: Morgan T. Johnson
- 申请人地址: US OR Beaverton
- 专利权人: Advanced Inquiry Systems, Inc.
- 当前专利权人: Advanced Inquiry Systems, Inc.
- 当前专利权人地址: US OR Beaverton
- 代理机构: Perkins Coie LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A wafer translator is provided with a patterned layer of wafer bonding thermoset plastic and is removably attached with a wafer so as to form a wafer/wafer translator pair. The wafer translator acts as a mechanical support during a thinning process as well as during a wafer dicing operation. The singulated integrated circuits are then removed from the wafer translator. In some embodiments, wafer level testing of the integrated circuits on the wafer is performed subsequent to the wafer thinning process but before the wafer and wafer translator are separated. In other embodiments, wafer level testing of the integrated circuits on the wafer is performed subsequent to the wafer dicing operation but before the diced wafer and wafer translator are separated.
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