发明授权
- 专利标题: Hybrid lithographic method for fabricating complex multidimensional structures
- 专利标题(中): 用于制造复杂多维结构的混合光刻方法
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申请号: US13171954申请日: 2011-06-29
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公开(公告)号: US08465910B2公开(公告)日: 2013-06-18
- 发明人: Jonathan Phillip Singer , Jae-Hwang Lee , Steven E. Kooi , Edwin Lorimer Thomas
- 申请人: Jonathan Phillip Singer , Jae-Hwang Lee , Steven E. Kooi , Edwin Lorimer Thomas
- 申请人地址: US MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: US MA Cambridge
- 代理机构: MIT Technology Licensing Office
- 代理商 Sam Pasternack
- 主分类号: G03F7/26
- IPC分类号: G03F7/26
摘要:
Lithographic Method. The method fabricates complex structures and includes depositing a photoresist onto a substrate, the photoresist including a predominantly thermal band of optical absorption possibly due to the incorporation of a doping agent. A three-dimensional pattern is generated within the resist using a first wavelength of light to effect activation of a photoinitiator to produce a latently photostructured resist. Focused laser spike annealing of the photostructured resist with a second wavelength of light selected to be absorbed by the thermally absorbing band to accelerate the photoinduced reaction in the resist is provided. Three-dimensional direct writing may be performed within the resist to define features not part of the interference pattern and the resist is developed to produce the complex structure.
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