发明授权
US08466514B2 Semiconductor power device integrated with improved gate source ESD clamp diodes
有权
半导体功率器件与改进的栅源ESD钳位二极管集成
- 专利标题: Semiconductor power device integrated with improved gate source ESD clamp diodes
- 专利标题(中): 半导体功率器件与改进的栅源ESD钳位二极管集成
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申请号: US13274642申请日: 2011-10-17
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公开(公告)号: US08466514B2公开(公告)日: 2013-06-18
- 发明人: Fu-Yuan Hsieh
- 申请人: Fu-Yuan Hsieh
- 申请人地址: TW
- 专利权人: Force Mos Technology Co., Ltd.
- 当前专利权人: Force Mos Technology Co., Ltd.
- 当前专利权人地址: TW
- 代理机构: Bacon & Thomas, PLLC
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
A trench semiconductor power device integrated with four types of ESD clamp diodes for optimization of total perimeter of the ESD clamp diodes, wherein the ESD clamp diodes comprise multiple back to back Zener diodes with alternating doped regions of a first conductivity type next to a second conductivity type, wherein each of the doped regions has a closed ring structure.
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