发明授权
- 专利标题: Apparatus for continuous coating
- 专利标题(中): 用于连续涂布的装置
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申请号: US13293266申请日: 2011-11-10
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公开(公告)号: US08470094B2公开(公告)日: 2013-06-25
- 发明人: Hubertus Von Der Waydbrink , Siegfried Scheibe , Jens Meyer , Andrej Wolf , Uwe Traeber , Michael Hentschel
- 申请人: Hubertus Von Der Waydbrink , Siegfried Scheibe , Jens Meyer , Andrej Wolf , Uwe Traeber , Michael Hentschel
- 申请人地址: DE Dresden
- 专利权人: VON ARDENNE Anlagentechnik GmBH
- 当前专利权人: VON ARDENNE Anlagentechnik GmBH
- 当前专利权人地址: DE Dresden
- 代理机构: Heslin Rothenberg Farley & Mesiti P.C.
- 优先权: DE102007039950 20070823
- 主分类号: C23C16/54
- IPC分类号: C23C16/54
摘要:
Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.
公开/授权文献
- US20120055404A1 APPARATUS FOR CONTINUOUS COATING 公开/授权日:2012-03-08
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