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公开(公告)号：US08470094B2
公开(公告)日：2013-06-25
申请号：US13293266
申请日：2011-11-10
申请人： Hubertus Von Der Waydbrink , Siegfried Scheibe , Jens Meyer , Andrej Wolf , Uwe Traeber , Michael Hentschel
发明人： Hubertus Von Der Waydbrink , Siegfried Scheibe , Jens Meyer , Andrej Wolf , Uwe Traeber , Michael Hentschel
IPC分类号： C23C16/54
CPC分类号： C23C16/54 , C23C16/4401
摘要： Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.
摘要翻译： 用于连续涂布的装置具有形成处理室的室壁，在室内形成处理区域的热绝缘体，位于处理区域中的基板的输送装置，其中基板的基板输送方向位于 用于连续涂覆的装置和加热基板的加热设备被设计成使不需要的涂层，特别是装置的部件最小化，以便最小化维护和维修设备的费用。冷凝件位于处理室中， 其延伸到处理区域中并通过冷凝来结合产生的蒸气。
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2.发明授权公开(公告)号：US08911231B2
公开(公告)日：2014-12-16
申请号：US13376465
申请日：2010-06-18
申请人： Hubertus Von Der Waydbrink , Thomas Meyer , Michael Hentschel , Reinhardt Bauer , Andrej Wolf , Hans-Christian Hecht
发明人： Hubertus Von Der Waydbrink , Thomas Meyer , Michael Hentschel , Reinhardt Bauer , Andrej Wolf , Hans-Christian Hecht
CPC分类号： C23C14/541 , C23C14/56
摘要： A substrate-treatment installation includes a vacuum chamber, a substrate treatment device within the vacuum chamber, a substrate transport device within the vacuum chamber for guiding a substrate along a longitudinal direction in a substrate transport plane past the substrate treatment device, and a device for controlling substrate temperature. The substrate temperature controlling device includes a heat-absorbing cooler on one side of the substrate transport plane and an insulation member selectively displaceable between at least two different positions to vary extent of thermal shielding of the heat-absorbing cooler relative to the substrate transport plane by the insulation member.
摘要翻译： 基板处理装置包括真空室，真空室内的基板处理装置，真空室内的基板输送装置，用于沿着基板输送面中的长度方向引导基板通过基板处理装置;以及装置， 控制基板温度。 衬底温度控制装置包括在衬底传送平面的一侧上的吸热冷却器和可在至少两个不同位置之间选择性移位的绝缘构件，以通过相对于衬底传送平面来改变热吸收冷却器的热屏蔽程度 绝缘构件。
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公开(公告)号：US20120118541A1
公开(公告)日：2012-05-17
申请号：US13376465
申请日：2010-06-18
申请人： Hubertus Von Der Waydbrink , Thomas Meyer , Michael Hentschel , Reinhardt Bauer , Andrej Wolf , Hans-Christian Hecht
发明人： Hubertus Von Der Waydbrink , Thomas Meyer , Michael Hentschel , Reinhardt Bauer , Andrej Wolf , Hans-Christian Hecht
IPC分类号： F28F13/00
CPC分类号： C23C14/541 , C23C14/56
摘要： A device for controlling the temperature of substrates in a substrate-treatment system, in which a substrate can be guided in the longitudinal extension of the substrate-treatment system in a substrate transport plane within a vacuum chamber past a treatment device, solves the problem of dynamically shaping a dynamic change of the thermal insulation to control the heat transfer in the substrate and thereby, reduce, in particular, thermal inertias by providing a heat-absorbing cooler side of the substrate transport plane. The heat-absorbing cooler can be shielded, at least partially from the substrate transport plane, using an insulation member.
摘要翻译： 用于控制基板处理系统中的基板的温度的装置，其中基板可以在基板处理系统的纵向延伸中在通过处理装置的真空室内的基板输送平面中被引导，解决了 动态地塑造热绝缘的动态变化以控制衬底中的热传递，从而通过提供衬底传输平面的吸热冷却器侧，特别地减少热惯性。 使用绝缘构件，可以至少部分地从基板输送平面屏蔽吸热式冷却器。
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4.发明申请METHOD AND DEVICE FOR PRODUCING AND PROCESSING LAYERS OF SUBSTRATES UNDER A DEFINED PROCESSING ATMOSPHERE 审中-公开用于生产和加工定义加工大气层底物层的方法和装置公开(公告)号：US20090061088A1
公开(公告)日：2009-03-05
申请号：US12176454
申请日：2008-07-21
IPC分类号： C23C16/00 , C23C16/458 , H05B6/00
CPC分类号： C23C16/46 , C23C14/24 , C23C14/562 , C23C16/545
摘要： A method is provided for producing a processing atmosphere for coating substrates, with this method primarily being used in CVD-processes for precipitating an individual layer or a system of individual layers under defined processing atmospheres, in which processing gas is supplied to a coating chamber in a defined manner and exhausted. Via the method and related devices, a variable processing atmosphere is adjustable inside the coating chamber in a flexible, reliable and homogenous manner, and requiring a reduced maintenance and energy expense, even when the substrate is heated. The processing gas is created by at least one gas channel extending perpendicular in reference to the substrate by way of supplying gas flow or exhausting, with a lateral extension being equivalent to the width of the substrate.
摘要翻译： 提供了一种用于生产用于涂覆基材的处理气氛的方法，该方法主要用于在规定的加工环境下沉淀单个层或各层的体系的CVD工艺，其中将处理气体供应到涂覆室 一个定义的方式和用尽。 通过该方法和相关设备，可以以柔性，可靠和均匀的方式在涂层室内调节可变处理气氛，并且即使在加热基板时也需要减少维护和能量消耗。 处理气体由至少一个气体通道产生，所述至少一个气体通道通过提供气流或排气而相对于基板垂直延伸，横向延伸部等于基板的宽度。
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公开(公告)号：US20130139750A1
公开(公告)日：2013-06-06
申请号：US13700811
申请日：2011-06-14
IPC分类号： B05C9/08
CPC分类号： B05C9/08 , C23C14/56 , C23C14/568
摘要： A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first sub-module, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
摘要翻译： 模块化建筑真空涂覆系统包括多个功能室，沿着纵向范围一个接一个地布置，其中基板通过基板传送区域中的室移动。 为了降低与供应媒体有关的与生产有关的和与安装相关的费用，作为第一子模块的功能室被布置在第一模块中并具有与至少第二模块相同的外部接口。
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公开(公告)号：US09186694B2
公开(公告)日：2015-11-17
申请号：US13700811
申请日：2011-06-14
CPC分类号： B05C9/08 , C23C14/56 , C23C14/568
摘要： A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
摘要翻译： 模块化建筑真空涂覆系统包括多个功能室，沿着纵向范围一个接一个地布置，其中基板通过基板传送区域中的室移动。 为了降低与供应媒体有关的与生产有关的和与安装相关的费用，作为第一子模块的功能室被布置在第一模块中并且具有与至少第二模块相同的外部接口。
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7.发明授权Transporting means and vacuum coating installation for substrates of different sizes 失效不同尺寸基板的运输方式和真空镀膜装置公开(公告)号：US08092607B2
公开(公告)日：2012-01-10
申请号：US12262434
申请日：2008-10-31
CPC分类号： C23C16/4587 , B65G49/061 , B65G49/063 , B65G2249/02
摘要： In a vacuum coating installation to coat planar substrates, comprising a vacuum chamber and a transport device arranged in the vacuum chamber for transporting the substrates along a transportation path through the vacuum chamber, with the transport device comprising a multitude of transport rollers arranged successively along the transportation path, each transport roller is adapted to be mounted at least at two different positions, vertically distanced from each other. A carrier frame has a substrate accepting structure and a guiding rod arranged at the bottom of the carrier frame in the direction of transportation to create a friction connection with the transportation device, connected to the carrier frame at the connection points, with the guiding rod being connected at least at one connection point to the carrier frame such that a relative displacement is possible of the guiding rod relative to the carrier frame in the direction of transportation.
摘要翻译： 在用于涂覆平面基板的真空涂布装置中，包括真空室和设置在真空室中的输送装置，用于沿着输送路径通过真空室输送基板，输送装置包括多个沿着 输送路径，每个输送辊适于至少安装在彼此垂直离开的两个不同位置处。 载体框架具有基板接收结构和引导杆，其在运输方向上布置在承载架的底部，以与传送装置形成摩擦连接，在连接点处连接到承载架，导杆为 至少在一个连接点处连接到承载架，使得导向杆相对于承载架在运输方向上的相对位移是可能的。
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