发明授权
- 专利标题： Method for the production of an ultra barrier layer system
- 专利标题（中）： 用于生产超级势垒层系统的方法
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申请号： US10597625申请日： 2004-11-23
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公开(公告)号： US08470140B2公开(公告)日： 2013-06-25
- 发明人: Christoph Charton , Matthias Fahland , Mario Krug , Nicolas Schiller , Steffen Straach
- 申请人： Christoph Charton , Matthias Fahland , Mario Krug , Nicolas Schiller , Steffen Straach
- 申请人地址： DE Munich
- 专利权人： Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- 当前专利权人： Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- 当前专利权人地址： DE Munich
- 代理机构： Greenblum & Bernstein, P.L.C.
- 优先权： DE102004005313 20040202
- 国际申请： PCT/EP2004/013258 WO 20041123
- 国际公布： WO2005/073427 WO 20050811
- 主分类号： C23C14/35
- IPC分类号： C23C14/35
摘要：
The invention relates to a method for producing an ultrabarrier layer system through vacuum coating a substrate with a layer stack that is embodied as an alternating layer system of smoothing layers and transparent ceramic layers, but comprising at least one smoothing layer between two transparent ceramic layers, which are applied by sputtering, in which during the deposition of the smoothing layer a monomer is admitted into an evacuated coating chamber in which a magnetron plasma is operated.
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