发明授权
US08471557B2 Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology
有权
用MEMS技术制造的半导体材料的集成三轴磁力计
- 专利标题: Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology
- 专利标题(中): 用MEMS技术制造的半导体材料的集成三轴磁力计
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申请号: US12965491申请日: 2010-12-10
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公开(公告)号: US08471557B2公开(公告)日: 2013-06-25
- 发明人: Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
- 申请人: Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed IP Law Group PLLC
- 优先权: ITTO2009A0973 20091210
- 主分类号: G01R33/02
- IPC分类号: G01R33/02
摘要:
Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.
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