发明授权
- 专利标题： Methods for monitoring processing equipment
- 专利标题（中）： 监测加工设备的方法
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申请号： US12915260申请日： 2010-10-29
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公开(公告)号： US08473247B2公开(公告)日： 2013-06-25
- 发明人: James P. Cruse , Dermot Cantwell , Michael R. Rice , Thorsten Kril , Charles Hardy
- 申请人： James P. Cruse , Dermot Cantwell , Michael R. Rice , Thorsten Kril , Charles Hardy
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Moser Taboada
- 代理商 Alan Taboada
- 主分类号： G04F1/00
- IPC分类号： G04F1/00 ; G04F3/00 ; G04F5/00 ; G04F7/00 ; G04F8/00 ; G04F10/00 ; G04G5/00 ; G04G7/00 ; G40G15/00
摘要：
Methods for monitoring processing equipment are provided herein. In some embodiments, a method for monitoring processing equipment when in an idle state for a period of idle time may include selecting a test from a list of a plurality of tests to perform on the processing equipment when the processing equipment is in the idle state, wherein the test has a total run time; starting the selected test; comparing a remaining idle time of the period of idle time to a remaining run time of the total run time as the selected test is performed; and determining whether to end the selected test prior to completing the total run time in response to the comparison.
公开/授权文献
- US20110270574A1 METHODS FOR MONITORING PROCESSING EQUIPMENT 公开/授权日：2011-11-03