Invention Grant
- Patent Title: Methods for monitoring processing equipment
- Patent Title (中): 监测加工设备的方法
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Application No.: US12915260Application Date: 2010-10-29
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Publication No.: US08473247B2Publication Date: 2013-06-25
- Inventor: James P. Cruse , Dermot Cantwell , Michael R. Rice , Thorsten Kril , Charles Hardy
- Applicant: James P. Cruse , Dermot Cantwell , Michael R. Rice , Thorsten Kril , Charles Hardy
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: G04F1/00
- IPC: G04F1/00 ; G04F3/00 ; G04F5/00 ; G04F7/00 ; G04F8/00 ; G04F10/00 ; G04G5/00 ; G04G7/00 ; G40G15/00
Abstract:
Methods for monitoring processing equipment are provided herein. In some embodiments, a method for monitoring processing equipment when in an idle state for a period of idle time may include selecting a test from a list of a plurality of tests to perform on the processing equipment when the processing equipment is in the idle state, wherein the test has a total run time; starting the selected test; comparing a remaining idle time of the period of idle time to a remaining run time of the total run time as the selected test is performed; and determining whether to end the selected test prior to completing the total run time in response to the comparison.
Public/Granted literature
- US20110270574A1 METHODS FOR MONITORING PROCESSING EQUIPMENT Public/Granted day:2011-11-03
Information query
