发明授权
- 专利标题: Particle beam microscope
- 专利标题(中): 粒子束显微镜
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申请号: US13539291申请日: 2012-06-29
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公开(公告)号: US08476589B2公开(公告)日: 2013-07-02
- 发明人: Gerd Benner , Stefan Meyer , Steffen Niederberger , Dirk Preikszas
- 申请人: Gerd Benner , Stefan Meyer , Steffen Niederberger , Dirk Preikszas
- 申请人地址: DE Jena
- 专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人地址: DE Jena
- 代理商 Bruce D Riter
- 优先权: DE102010056321 20101227
- 主分类号: H01J37/244
- IPC分类号: H01J37/244
摘要:
A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53 and the object plane 19. First and second X-ray detectors 33 have first and second radiation-sensitive substrates 35 arranged such that a first elevation angle β1 between a first straight line 551 extending through the point of intersection 51 and a center of the first substrate 351 and the object plane 19 differs from a second elevation angle β2 between a second straight line 552 extending through the point of intersection 51 and a center of the second substrate 352 and the object plane 19 by more than 14°.
公开/授权文献
- US20120326032A1 Particle Beam Microscope 公开/授权日:2012-12-27