发明授权
- 专利标题: Three-dimensional semiconductor memory device
- 专利标题(中): 三维半导体存储器件
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申请号: US13012485申请日: 2011-01-24
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公开(公告)号: US08482138B2公开(公告)日: 2013-07-09
- 发明人: Sung-Min Hwang , Hansoo Kim , Wonseok Cho , Jaehoon Jang
- 申请人: Sung-Min Hwang , Hansoo Kim , Wonseok Cho , Jaehoon Jang
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2010-0006124 20100122
- 主分类号: H01L29/40
- IPC分类号: H01L29/40
摘要:
Provided is a three-dimensional semiconductor device and method for fabricating the same. The device includes a first electrode structure and a second electrode structure stacked sequentially on a substrate. The first and second electrode structures include stacked first electrodes and stacked second electrodes, respectively. Each of the first and second electrodes includes a horizontal portion parallel with the substrate and an extension portion extending from the horizontal portion along a direction penetrating an upper surface of the substrate. Here, the substrate may be closer to top surfaces of the extension portions of the first electrodes than to the horizontal portion of at least one of the second electrodes.
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