Invention Grant
US08485041B2 Sensor system, method for operating a sensor system, and method for manufacturing a sensor system
有权
传感器系统，用于操作传感器系统的方法以及用于制造传感器系统的方法
- Patent Title: Sensor system, method for operating a sensor system, and method for manufacturing a sensor system
- Patent Title (中): 传感器系统，用于操作传感器系统的方法以及用于制造传感器系统的方法
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Application No.: US12737966Application Date: 2009-07-10
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Publication No.: US08485041B2Publication Date: 2013-07-16
- Inventor: Marcus Ahles , Hubert Benzel , Heribert Weber
- Applicant: Marcus Ahles , Hubert Benzel , Heribert Weber
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008041942 20080910
- International Application: PCT/EP2009/058802 WO 20090710
- International Announcement: WO2010/028879 WO 20100318
- Main IPC: G01L7/00
- IPC: G01L7/00 ; H01L29/84
Abstract:
A sensor system, e.g., a pressure sensor system, includes a substrate having at least one trench on a first side. The trench is provided for forming a first diaphragm region on a second side opposite from the first side. In addition, a second diaphragm region and a cavern are integrated into the material of the first diaphragm region.
Public/Granted literature
- US20110259109A1 SENSOR SYSTEM, METHOD FOR OPERATING A SENSOR SYSTEM, AND METHOD FOR MANUFACTURING A SENSOR SYSTEM Public/Granted day:2011-10-27
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