发明授权
- 专利标题： Antireflective coating composition and process thereof
- 专利标题（中）： 防反射涂料组合物及其工艺
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申请号： US12646191申请日： 2009-12-23
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公开(公告)号： US08486609B2公开(公告)日： 2013-07-16
- 发明人: M. Dalil Rahman , Douglas McKenzie , Huirong Yao , JoonYeon Cho , Yi Yl , Guanyang Lin
- 申请人： M. Dalil Rahman , Douglas McKenzie , Huirong Yao , JoonYeon Cho , Yi Yl , Guanyang Lin
- 申请人地址： US NJ Somerville
- 专利权人： AZ Electronic Materials USA Corp.
- 当前专利权人： AZ Electronic Materials USA Corp.
- 当前专利权人地址： US NJ Somerville
- 代理商 Sangya Jain
- 主分类号： G03F7/32
- IPC分类号： G03F7/32 ; G03F7/11 ; C08G65/48 ; C09D165/00
摘要：
The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): A-Bn (1) where A is a fused aromatic ring and B has a structure (2), where R1 is C1-C4alkyl and R2 is C1-C4alkyl. The invention further relates to a process for forming an image using the composition.
公开/授权文献
- US20110151376A1 Antireflective Coating Composition and Process Thereof 公开/授权日：2011-06-23
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