Invention Grant
- Patent Title: Wafer level packaging method of encapsulating the bottom and side of a semiconductor chip
- Patent Title (中): 封装半导体芯片的底部和侧面的晶片级封装方法
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Application No.: US13273168Application Date: 2011-10-13
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Publication No.: US08486803B2Publication Date: 2013-07-16
- Inventor: Ping Huang , Ruisheng Wu , Lei Duan , Yi Chen , Yuping Gong
- Applicant: Ping Huang , Ruisheng Wu , Lei Duan , Yi Chen , Yuping Gong
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha & Omega Semiconductor, Inc.
- Current Assignee: Alpha & Omega Semiconductor, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: CH Emily LLC
- Agent Chein-Hwa Tsao
- Main IPC: H01L21/30
- IPC: H01L21/30

Abstract:
A chip-scale packaging method, with bottom and side of a semiconductor chip encapsulated, includes the following steps: attaching backside of a thinned semiconductor wafer to a dicing tape; separating individual chips by cutting from front side of the wafer at scribe line but not cut through the dicing tape; flipping and attaching the wafer onto a top surface of a double-sided tape, then removing the dicing tape; attaching bottom surface of the double-sided tape on a supporting plate; filling the space between adjacent chips and covering the whole wafer backside with a molding material; flipping the whole structure and remove the supporting plate; placing solder balls at corresponding positions on electrodes of each chip and performing backflow treatment; finally separating individual chip packages by cutting through molding material at the space between adjacent chip packages with molding material encapsulating the bottom and side of each individual semiconductor chip.
Public/Granted literature
- US20130095612A1 WAFER LEVEL PACKAGING METHOD OF ENCAPSULATING THE BOTTOM AND SIDE OF A SEMICONDUCTOR CHIP Public/Granted day:2013-04-18
Information query
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