发明授权
- 专利标题: Spectral reflectometry method and device
- 专利标题(中): 光谱反射测量法和装置
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申请号: US13351444申请日: 2012-01-17
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公开(公告)号: US08488124B2公开(公告)日: 2013-07-16
- 发明人: Grigory Valentinovich Gelikonov , Valentin Mikhailovich Gelikonov , Pavel Andreevich Shilyagin
- 申请人: Grigory Valentinovich Gelikonov , Valentin Mikhailovich Gelikonov , Pavel Andreevich Shilyagin
- 申请人地址: RU Nizhny Novgorod
- 专利权人: Limited Liability Company “Biomedical Technologies”
- 当前专利权人: Limited Liability Company “Biomedical Technologies”
- 当前专利权人地址: RU Nizhny Novgorod
- 代理机构: Patentbar International PC
- 优先权: RU2009127676 20090717
- 主分类号: G01J3/45
- IPC分类号: G01J3/45
摘要:
An optical low-coherence reflectometry with spectral reception for obtaining images without coherent noise caused by self-interference of the radiation scattered from the studied object and by spurious reflections in the optical path of the system is disclosed. Two or more consecutive measurements of the interference spectrum are made. During at least one measurement of the interference spectrum by means of the interference control unit the phase between the interfering parts of the radiation is modulated by a certain law during exposure, which results in averaging and zeroing of the cross-correlation (useful) component of the registered spectrum, and during at least one additional measurement of the interference spectrum, the phase between the interfering parts of the radiation is not modulated during exposure. The phase between the interfering parts of the radiation may be set to be different in additional measurements of the interference spectrum.
公开/授权文献
- US20120182560A1 SPECTRAL REFLECTOMETRY METHOD AND DEVICE 公开/授权日:2012-07-19
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