公开(公告)号：US20120182560A1

公开(公告)日：2012-07-19

申请号：US13351444

申请日：2012-01-17

申请人： Grigory Valentinovich Gelikonov ,  Valentin Mikhailovich Gelikonov ,  Pavel Andreevich Shilyagin

发明人： Grigory Valentinovich Gelikonov ,  Valentin Mikhailovich Gelikonov ,  Pavel Andreevich Shilyagin

IPC分类号： G01N21/55

CPC分类号： G01B9/02044 ,  G01B9/0201 ,  G01B9/0209

摘要： The invention relates to optical low-coherence reflectometry with spectral reception and may be used for obtaining images without coherent noise caused by self-interference of the radiation scattered from the studied object and by spurious reflections in the optical path of the system. Two or more consecutive measurements of the interference spectrum are made. During at least one measurement of the interference spectrum by means of the interference control unit the phase between the interfering parts of the radiation is modulated by a certain law during exposure, which results in averaging and, hence, zeroing of the cross-correlation (useful) component of the registered spectrum, and during at least one additional measurement of the interference spectrum, the phase between the interfering parts of the radiation is not modulated during exposure. The phase between the interfering parts of the radiation may be set to be different in additional measurements of the interference spectrum. The invention allows coherent noise to be fully eliminated without loss of the radiation power scattered by the object.

摘要翻译： 本发明涉及具有光谱接收的光学低相干反射测量，并且可以用于获得没有由被研究物体散射的辐射的自干扰和系统光路中的假反射引起的相干噪声的图像。 进行两个或多个连续的干涉光谱测量。 在通过干扰控制单元对干扰谱的至少一次测量期间，辐射的干扰部分之间的相位在曝光期间被一定的规律调制，这导致互相关的平均化和因此的归零（有用的 ）分量，并且在干扰光谱的至少一次附加测量期间，辐射的干扰部分之间的相位在曝光期间不被调制。 辐射的干扰部分之间的相位可以被设置为在附加的干涉光谱测量中是不同的。 本发明允许完全消除相干噪声，而不损失被物体散射的辐射功率。

公开(公告)号：US08488124B2

公开(公告)日：2013-07-16

申请号：US13351444

申请日：2012-01-17

申请人： Grigory Valentinovich Gelikonov ,  Valentin Mikhailovich Gelikonov ,  Pavel Andreevich Shilyagin

发明人： Grigory Valentinovich Gelikonov ,  Valentin Mikhailovich Gelikonov ,  Pavel Andreevich Shilyagin

IPC分类号： G01J3/45

CPC分类号： G01B9/02044 ,  G01B9/0201 ,  G01B9/0209

摘要： An optical low-coherence reflectometry with spectral reception for obtaining images without coherent noise caused by self-interference of the radiation scattered from the studied object and by spurious reflections in the optical path of the system is disclosed. Two or more consecutive measurements of the interference spectrum are made. During at least one measurement of the interference spectrum by means of the interference control unit the phase between the interfering parts of the radiation is modulated by a certain law during exposure, which results in averaging and zeroing of the cross-correlation (useful) component of the registered spectrum, and during at least one additional measurement of the interference spectrum, the phase between the interfering parts of the radiation is not modulated during exposure. The phase between the interfering parts of the radiation may be set to be different in additional measurements of the interference spectrum.

摘要翻译： 公开了具有频谱接收的光学低相干反射测量，用于获得没有由研究对象散射的辐射的自干扰引起的相干噪声的图像，以及系统的光路中的寄生反射。 进行两个或多个连续的干涉光谱测量。 在通过干扰控制单元对干扰谱的至少一次测量期间，辐射的干扰部分之间的相位在曝光期间被某个定律调制，这导致了互相关（有用的）分量的平均和归零 注册的光谱，并且在干扰光谱的至少一个附加测量期间，辐射的干扰部分之间的相位在曝光期间不被调制。 辐射的干扰部分之间的相位可以被设置为在附加的干涉光谱测量中是不同的。