Invention Grant
- Patent Title: Lithographic apparatus and device manufacturing method
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Application No.: US11882853Application Date: 2007-08-06
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Publication No.: US08493548B2Publication Date: 2013-07-23
- Inventor: Vladimir Vitalevich Ivanov , Vadim Yevgenyevich Banine , Konstantin Nikolaevich Koshelev , Vladimir Mihailovitch Krivtsun
- Applicant: Vladimir Vitalevich Ivanov , Vadim Yevgenyevich Banine , Konstantin Nikolaevich Koshelev , Vladimir Mihailovitch Krivtsun
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/72 ; G03B27/32 ; G03B27/42

Abstract:
A lithographic system includes a source configured to generate a radiation, the source including a cathode and an anode, the cathode and the anode configured to create a discharge in a fuel located in a discharge space so as to generate a plasma, the discharge space including, in use, a substance configured to adjust radiation emission by the plasma so as to control a volume defined by the plasma; a pattern support configured to hold a patterning device, the patterning device configured to pattern the radiation to form a patterned beam of radiation; a substrate support configured to support a substrate; and a projection system configured to project the patterned beam of radiation onto the substrate.
Public/Granted literature
- US20090040491A1 Lithographic apparatus and device manufacturing method Public/Granted day:2009-02-12
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