发明授权
- 专利标题: Implantable microelectronic device and method of manufacture
- 专利标题(中): 植入式微电子器件及其制造方法
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申请号: US13567366申请日: 2012-08-06
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公开(公告)号: US08501547B2公开(公告)日: 2013-08-06
- 发明人: Robert J. Greenberg , Neil Hamilton Talbot , Jordan Matthew Neysmith , Jerry Ok , Honggang Jiang
- 申请人: Robert J. Greenberg , Neil Hamilton Talbot , Jordan Matthew Neysmith , Jerry Ok , Honggang Jiang
- 申请人地址: US CA Sylmar
- 专利权人: Second Sight Medical Products, Inc.
- 当前专利权人: Second Sight Medical Products, Inc.
- 当前专利权人地址: US CA Sylmar
- 代理商 Scott B. Dunbar
- 主分类号: H01L21/56
- IPC分类号: H01L21/56
摘要:
An implantable hermetically sealed microelectronic device and method of manufacture are disclosed. The microelectronic device of the present invention is hermetically encased in a insulator, such as alumina formed by ion bean assisted deposition (“IBAD”), with a stack of biocompatible conductive layers extending from a contact pad on the device to an aperture in the hermetic layer. In a preferred embodiment, one or more patterned titanium layers are formed over the device contact pad, and one or more platinum layers are formed over the titanium layers, such that the top surface of the upper platinum layer defines an external, biocompatible electrical contact for the device. Preferably, the bottom conductive layer is larger than the contact pad on the device, and a layer in the stack defines a shoulder.
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