发明授权
- 专利标题: Polishing liquid for metal film and polishing method
- 专利标题(中): 抛光液用于金属膜和抛光方法
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申请号: US12668096申请日: 2008-07-08
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公开(公告)号: US08501625B2公开(公告)日: 2013-08-06
- 发明人: Kouji Haga , Masato Fukasawa , Jin Amanokura , Hiroshi Nakagawa
- 申请人: Kouji Haga , Masato Fukasawa , Jin Amanokura , Hiroshi Nakagawa
- 申请人地址: JP Tokyo
- 专利权人: Hitachi Chemical Co., Ltd.
- 当前专利权人: Hitachi Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2007-180928 20070710
- 国际申请: PCT/JP2008/062352 WO 20080708
- 国际公布: WO2009/008431 WO 20090115
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; C09G1/04
摘要:
The invention relates to a polishing liquid for metal film comprising 7.0% by weight or more of an oxidizer for metal, a water-soluble polymer, an oxidized metal dissolving agent, a metal anticorrosive agent and water, provided that the total amount of the polishing liquid for metal film is 100% by weight, wherein the water-soluble polymer has a weight average molecular weight of 150,000 or more and is at least one member selected from among a polycarboxylic acid, a salt of a polycarboxylic acid, and a polycarboxylic acid ester. According to the invention, provided is a polishing liquid for metal film, by which polishing can be performed at a high rate even under a polishing pressure as low as 1 psi or lower, and such that a polished film after polishing is excellent in planarity, furthermore, with which a high polishing rate can be obtained even in an initial stage of polishing, and provided is a polishing method using the polishing liquid.
公开/授权文献
- US20100323584A1 POLISHING LIQUID FOR METAL FILM AND POLISHING METHOD 公开/授权日:2010-12-23
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