发明授权
US08512583B2 Method using block copolymers and a hard electroplated mask for making a master disk for nanoimprinting patterned magnetic recording disks
失效
使用嵌段共聚物和硬电镀掩模的方法制造用于纳米压印图案化磁记录盘的母盘
- 专利标题： Method using block copolymers and a hard electroplated mask for making a master disk for nanoimprinting patterned magnetic recording disks
- 专利标题（中）： 使用嵌段共聚物和硬电镀掩模的方法制造用于纳米压印图案化磁记录盘的母盘
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申请号： US13236484申请日： 2011-09-19
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公开(公告)号： US08512583B2公开(公告)日： 2013-08-20
- 发明人: Christian Rene′ Bonhote , Jeffrey S. Lille , Ricardo Ruiz , Georges Gibran Siddiqi
- 申请人： Christian Rene′ Bonhote , Jeffrey S. Lille , Ricardo Ruiz , Georges Gibran Siddiqi
- 申请人地址： NL Amsterdam
- 专利权人： HGST Netherlands B.V.
- 当前专利权人： HGST Netherlands B.V.
- 当前专利权人地址： NL Amsterdam
- 代理商 Thomas R. Berthold
- 主分类号： B44C1/22
- IPC分类号： B44C1/22
摘要：
A method for making a master disk to be used in the nanoimprinting process to make patterned-media disks uses an electrically conductive substrate and guided self-assembly of a block copolymer to form patterns of generally radial lines and/or generally concentric rings of one of the block copolymer components. A metal is electroplated onto the substrate in the regions not protected by the lines and/or rings. After removal of the block copolymer component, the remaining metal pattern is used as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.