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1.发明申请METHOD USING BLOCK COPOLYMERS AND A HARD ELECTROPLATED MASK FOR MAKING A MASTER DISK FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 失效使用块状共聚物的方法和用于制备用于印制图形磁记录盘的主磁盘的硬电极掩模公开(公告)号：US20130068719A1
公开(公告)日：2013-03-21
申请号：US13236484
申请日：2011-09-19
摘要： A method for making a master disk to be used in the nanoimprinting process to make patterned-media disks uses an electrically conductive substrate and guided self-assembly of a block copolymer to form patterns of generally radial lines and/or generally concentric rings of one of the block copolymer components. A metal is electroplated onto the substrate in the regions not protected by the lines and/or rings. After removal of the block copolymer component, the remaining metal pattern is used as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译： 一种用于在纳米压印过程中制造母盘以使图案化介质盘使用导电基底并引导嵌段共聚物的自组装以形成大体径向线和/或大致同心环的图案的方法 嵌段共聚物组分。 在不受线路和/或环保护的区域中，将金属电镀到衬底上。 在除去嵌段共聚物组分之后，剩余的金属图案用作蚀刻掩模以制造最终的母盘或两个单独的模具，然后用于制造母盘。
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2.发明授权Method using block copolymers and a hard electroplated mask for making a master disk for nanoimprinting patterned magnetic recording disks 失效使用嵌段共聚物和硬电镀掩模的方法制造用于纳米压印图案化磁记录盘的母盘公开(公告)号：US08512583B2
公开(公告)日：2013-08-20
申请号：US13236484
申请日：2011-09-19
IPC分类号： B44C1/22
摘要： A method for making a master disk to be used in the nanoimprinting process to make patterned-media disks uses an electrically conductive substrate and guided self-assembly of a block copolymer to form patterns of generally radial lines and/or generally concentric rings of one of the block copolymer components. A metal is electroplated onto the substrate in the regions not protected by the lines and/or rings. After removal of the block copolymer component, the remaining metal pattern is used as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译： 一种用于在纳米压印过程中制造母盘以使图案化介质盘使用导电基底并引导嵌段共聚物的自组装以形成大体径向线和/或大致同心环的图案的方法 嵌段共聚物组分。 在不受线路和/或环保护的区域中，将金属电镀到衬底上。 在除去嵌段共聚物组分之后，剩余的金属图案用作蚀刻掩模以制造最终的母盘或两个单独的模具，然后用于制造母盘。
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3.发明授权System, method and apparatus for seedless electroplated structure on a semiconductor substrate 有权半导体衬底上无电解电镀结构的系统，方法和装置公开(公告)号：US09236260B2
公开(公告)日：2016-01-12
申请号：US13328218
申请日：2011-12-16
IPC分类号： H01L21/70 , H01L21/28 , H01L29/66 , H01L29/78 , H01L21/8238
CPC分类号： H01L21/28052 , H01L21/823814 , H01L21/823828 , H01L29/665 , H01L29/78
摘要： An integrated circuit has a doped silicon semiconductor with regions of insulators and bare silicon. The bare silicon regions are isolated from other bare silicon regions. A semiconductor device on the doped silicon semiconductor has at least two electrical connections to form regions of patterned metal. A metal is electroplated directly on each of the regions of patterned metal to form plated connections without a seed layer. A self-aligned silicide is located under each plated connection, formed by annealing, for the regions of plated metal on bare silicon.
摘要翻译： 集成电路具有具有绝缘体和裸硅区域的掺杂硅半导体。 裸硅区域与其他裸硅区域隔离。 掺杂硅半导体上的半导体器件具有至少两个电连接以形成图案化金属的区域。 将金属直接电镀在图案化金属的每个区域上，以形成没有种子层的电镀连接。 自对准硅化物位于通过退火形成的每个电镀连接处，用于裸硅上的电镀金属区域。
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4.发明申请SYSTEM, METHOD AND APPARATUS FOR SEEDLESS ELECTROPLATED STRUCTURE ON A SEMICONDUCTOR SUBSTRATE 有权半导体基板上无缝电镀结构的系统，方法和装置公开(公告)号：US20130154020A1
公开(公告)日：2013-06-20
申请号：US13328218
申请日：2011-12-16
IPC分类号： H01L27/092 , H01L21/28
CPC分类号： H01L21/28052 , H01L21/823814 , H01L21/823828 , H01L29/665 , H01L29/78
摘要： An integrated circuit has a doped silicon semiconductor with regions of insulators and bare silicon. The bare silicon regions are isolated from other bare silicon regions. A semiconductor device on the doped silicon semiconductor has at least two electrical connections to form regions of patterned metal. A metal is electroplated directly on each of the regions of patterned metal to form plated connections without a seed layer. A self-aligned silicide is located under each plated connection, formed by annealing, for the regions of plated metal on bare silicon.
摘要翻译： 集成电路具有具有绝缘体和裸硅区域的掺杂硅半导体。 裸硅区域与其他裸硅区域隔离。 掺杂硅半导体上的半导体器件具有至少两个电连接以形成图案化金属的区域。 将金属直接电镀在图案化金属的每个区域上，以形成没有种子层的电镀连接。 自对准硅化物位于通过退火形成的每个电镀连接处，用于裸硅上的电镀金属区域。
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5.发明授权Perpendicular write head having a stepped flare structure and method of manufacture thereof 有权具有阶梯式火炬结构的垂直写头及其制造方法公开(公告)号：US08634162B2
公开(公告)日：2014-01-21
申请号：US11683972
申请日：2007-03-08
申请人： Christian Rene Bonhote , Thomas Dudley Boone, Jr. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
发明人： Christian Rene Bonhote , Thomas Dudley Boone, Jr. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
IPC分类号： G11B5/147
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head may also include a magnetic trailing shield that wraps around the main pole portion. The trailing shield can have a hack edge defining a trailing shield throat height that is either between the secondary flare point or coincident or behind the secondary flare point, depending on design requirements.
摘要翻译： 一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。 由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。 这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。 写头还可以包括围绕主极部分包裹的磁性后挡板。 后挡板可以具有限定根据设计要求在二次火炬点之间或者在二次火炬点之间或后面的尾部屏蔽喉部高度的黑色边缘。
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6.发明授权Method of making a write head lapping guide about aligned to a non-magnetic layer surrounding a write pole 有权制作写头研磨导向器的方法，该方法与围绕写柱的非磁性层相对准公开(公告)号：US08161627B2
公开(公告)日：2012-04-24
申请号：US12110705
申请日：2008-04-28
申请人： Christian Rene Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
发明人： Christian Rene Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
CPC分类号： G11B5/3163 , G11B5/3133 , G11B5/3169 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method in one embodiment includes forming an electric lapping guide layer; forming a write pole; forming a first gap layer over the write pole; masking a portion of the first gap layer for defining a window over the write pole and at least a portion of the electric lapping guide layer; and forming a bump over the write pole in the window. Additional methods and systems are presented.
摘要翻译： 一个实施例中的方法包括形成电研磨引导层; 形成写柱; 在所述写入极上形成第一间隙层; 掩蔽所述第一间隙层的一部分以限定所述写入极上的窗口和所述电动研磨引导层的至少一部分; 并在窗口上的写入极上形成凸块。 介绍了其他方法和系统。
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公开(公告)号：US20100165513A1
公开(公告)日：2010-07-01
申请号：US12347058
申请日：2008-12-31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046
摘要： A system according to one embodiment includes a write pole having an end region positioned towards an air bearing surface, a first flare point, and a second flare point positioned between the air bearing surface and the first flare point; and a shield positioned above the write pole, wherein a cross sectional area of the write pole at a point between the first and second flare points along a plane passing through the write pole and oriented about parallel to the air bearing surface is greater than a cross sectional area of the end region of the write pole along a plane oriented parallel to the plane passing through the second flare point. Additional systems and methods are also presented.
摘要翻译： 根据一个实施例的系统包括写入极，其具有朝向空气支撑表面定位的端部区域，第一扩口点和位于空气支承表面和第一扩张点之间的第二扩张点; 以及位于所述写入极上方的屏蔽件，其中所述写入极点在所述第一和第二扩张点之间的点沿着穿过所述写入极并平行于所述空气支承表面定向的平面的横截面面积大于十字 所述写入极的端部区域沿着平行于通过所述第二扩张点的平面取向的平面的横截面积。 还介绍了其他系统和方法。
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8.发明申请WRITE HEAD LAPPING GUIDE ABOUT ALIGNED TO A NON-MAGNETIC LAYER SURROUNDING A WRITE POLE AND A METHOD FOR MAKING THE SAME 有权关于对准非磁性层的写头指导手写一个写入点及其制作方法公开(公告)号：US20090268348A1
公开(公告)日：2009-10-29
申请号：US12110705
申请日：2008-04-28
申请人： Christian Rene Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
发明人： Christian Rene Bonhote , Jeffrey S. Lille , Vladimir Nikitin , Aron Pentek , Neil Leslie Robertson
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/3133 , G11B5/3169 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method in one embodiment includes forming an electric lapping guide layer; forming a write pole; forming a first gap layer over the write pole; masking a portion of the first gap layer for defining a window over the write pole and at least a portion of the electric lapping guide layer; and forming a bump over the write pole in the window. A system in one embodiment includes an electric lapping guide layer; a write pole positioned to one side of the electric lapping guide layer; and a bump formed over the write pole in a window, wherein a back end of the electric lapping guide layer and a front end of the bump are about a same distance from a lapped surface of a head. Additional methods and systems are presented.
摘要翻译： 一个实施例中的方法包括形成电研磨引导层; 形成写柱; 在所述写入极上形成第一间隙层; 掩蔽所述第一间隙层的一部分以限定所述写入极上的窗口和所述电动研磨引导层的至少一部分; 并在窗口上的写入极上形成凸块。 一个实施例中的系统包括电研磨引导层; 位于所述电研磨引导层的一侧的写入极; 以及在窗口中的写入极上形成的凸块，其中电研磨引导层的后端和凸块的前端与头部的重叠表面大致相同的距离。 介绍了其他方法和系统。
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9.发明申请PERPENDICULAR WRITE HEAD HAVING A STEPPED FLARE STRUCTURE AND METHOD OF MANUFACTURE THEREOF 审中-公开具有阶梯式结构的平头书写头及其制造方法公开(公告)号：US20100128392A1
公开(公告)日：2010-05-27
申请号：US12646858
申请日：2009-12-23
申请人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
发明人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
IPC分类号： G11B5/127
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head also includes a non-magnetic spacer layer formed over the magnetic shell structure and a trailing magnetic shield, a portion of which is formed over the non-magnetic spacer.
摘要翻译： 一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。 由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。 这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。 写头还包括形成在磁性壳结构上的非磁性间隔层和尾部磁屏蔽，其一部分形成在非磁性间隔物上。
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10.发明申请Method for self aligning a lapping guide with a structure of a magnetic write head 有权用于将研磨引导件与磁性写入头的结构自对准的方法公开(公告)号：US20100126001A1
公开(公告)日：2010-05-27
申请号：US12646884
申请日：2009-12-23
申请人： Christian Rene Bonhote , Thomas Budley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
发明人： Christian Rene Bonhote , Thomas Budley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
IPC分类号： G11B5/127
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A method for self aligning a lapping guide with a structure of a write pole. A write pole is formed over a substrate and an electrically conductive material lapping guide material is deposited in a location that is removed from the write pole. A mask is then formed over a portion of the write pole and a portion of the electrically conductive material. A material removal process such as reactive ion etching can then be performed to remove a portion of the magnetic material that is not protected by the mask structure. An magnetic material is then electroplated over the write pole with the write pole, with the mask still in place. In this way, the electroplated material has an edge that is self aligned with an edge of the electrically conductive lapping guide material, both being defined by the same mask structure.
摘要翻译： 一种用于将研磨导向器与写入杆的结构自对准的方法。 写入极在衬底上形成，并且导电材料研磨引导材料沉积在从写柱移除的位置。 然后在写入极的一部分和导电材料的一部分上形成掩模。 然后可以执行诸如反应离子蚀刻的材料去除处理以去除未被掩模结构保护的磁性材料的一部分。 然后将磁性材料用写入极电镀在写入极上，同时掩模仍然在位。 以这种方式，电镀材料具有与导电研磨导向材料的边缘自对准的边缘，两者都由相同的掩模结构限定。
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