发明授权
- 专利标题: Memory devices and method of manufacturing the same
- 专利标题(中): 存储器件及其制造方法
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申请号: US13484999申请日: 2012-05-31
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公开(公告)号: US08513136B2公开(公告)日: 2013-08-20
- 发明人: Doo-hwan Park , Gyu-hwan Oh , Dong-whee Kwon , Kyung-min Chung
- 申请人: Doo-hwan Park , Gyu-hwan Oh , Dong-whee Kwon , Kyung-min Chung
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2011-0051771 20110531; KR10-2011-0094276 20110919
- 主分类号: H01L21/302
- IPC分类号: H01L21/302 ; H01L21/461
摘要:
Memory devices and methods of forming memory devices including forming a plurality of preliminary electrodes, each of the plurality of preliminary electrodes including a protruding region, protruding from a first mold insulating layer, forming a second mold insulating layer on the first mold insulating layer, removing at least a portion of the plurality of preliminary electrodes to form a plurality of openings in the second mold insulating layer and a plurality of lower electrodes, and forming a plurality of memory elements in the plurality of openings. Memory devices and methods of forming memory devices including forming one or more insulating layers on sidewalls of all or part of a plurality of lower electrodes and/or a plurality of memory elements.
公开/授权文献
- US20120305522A1 MEMORY DEVICES AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2012-12-06
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