发明授权
- 专利标题: LDMOS transistor with asymmetric spacer as gate
- 专利标题(中): LDMOS晶体管采用非对称间隔器作为栅极
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申请号: US12592011申请日: 2009-11-18
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公开(公告)号: US08525257B2公开(公告)日: 2013-09-03
- 发明人: Martin Alter , Paul Moore
- 申请人: Martin Alter , Paul Moore
- 申请人地址: US CA San Jose
- 专利权人: Micrel, Inc.
- 当前专利权人: Micrel, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Van Pelt, Yi & James LLP
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L21/28
摘要:
The present invention provides a laterally diffused metal oxide semiconductor (LDMOS) transistor and a method for fabricating it. The LDMOS transistor includes an n-type epitaxial layer formed on a p-type substrate, and an asymmetric conductive spacer which acts as its gate. The LDMOS transistor also includes a source and a drain region on either side of the asymmetric conductive spacer, and a channel region formed by ion-implantation on the asymmetric conductive spacer. The height of the asymmetric conductive spacer increases from the source region to the drain region. The channel region is essentially completely under the asymmetric conductive spacer and has smaller length than that of the channel region of the prior art LDMOS transistors. The LDMOS transistor of the present invention also includes a field oxide layer surrounding the active region of the transistor, and a thin dielectric layer isolating the asymmetric conductive spacer from the n-type epitaxial layer.
公开/授权文献
- US20110115017A1 LDMOS transistor with asymmetric spacer as gate 公开/授权日:2011-05-19
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