Invention Grant
- Patent Title: Dissection splitting with optical proximity correction to reduce corner rounding
- Patent Title (中): 用光学邻近校正解剖分割以减少圆角
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Application No.: US13419977Application Date: 2012-03-14
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Publication No.: US08527916B1Publication Date: 2013-09-03
- Inventor: Chia-Ping Chiang , Tsong-Hua Ou , Yu-Po Tang , Ming-Hui Chih , Wen-Li Cheng , Cheng Kun Tsai , Wen-Chun Huang , Ru-Gun Liu
- Applicant: Chia-Ping Chiang , Tsong-Hua Ou , Yu-Po Tang , Ming-Hui Chih , Wen-Li Cheng , Cheng Kun Tsai , Wen-Chun Huang , Ru-Gun Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
The present disclosure provides one embodiment of an integrated circuit (IC) method. The method includes receiving an IC design layout having an main feature, the main feature including two corners and an edge spanning between the two corners; performing a feature adjustment to the edge; performing a dissection to the edge such that the edge is divided to include two corner segments and one center segment between the two corner segments; performing a first optical proximity correction (OPC) to the main feature for a center target associated with the center segment; thereafter, performing a second OPC to the main feature for two corner targets associated with the corner segments; and thereafter, performing a third OPC to main feature for the center target, resulting in a modified design layout.
Public/Granted literature
- US20130246981A1 DISSECTION SPLITTING WITH OPTICAL PROXIMITY CORRECTION TO REDUCE CORNER ROUNDING Public/Granted day:2013-09-19
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