发明授权
US08528725B2 Flexible substrate conveying device 有权
柔性基板输送装置

Flexible substrate conveying device
摘要:
A conveying device has a substrate conveying device for conveying a flexible substrate while holding the flexible substrate upright, with one end part in a width direction of the flexible substrate being on an upper side; and a substrate retaining device. The substrate retaining device has a pair of grip rollers; a support mechanism rotatably supporting the pair of grip rollers; a transmission mechanism transmitting a force to pressure contact one of the grip rollers with the other grip roller; a first driving device configured to adjust a pressure contact force of the pair of grip rollers; an angle adjusting mechanism configured to incline the pair of grip rollers with respect to a conveying direction of the flexible substrate; and a second driving device configured to adjust an inclination angle of the pair of grip rollers with respect to the conveying direction of the flexible substrate.
公开/授权文献
信息查询
0/0