Invention Grant
- Patent Title: Rotatable magnetron sputtering with axially movable target electrode tube
- Patent Title (中): 可旋转磁控溅射与轴向移动目标电极管
-
Application No.: US12602298Application Date: 2008-06-06
-
Publication No.: US08535490B2Publication Date: 2013-09-17
- Inventor: John Madocks , Patrick Lawrence Morse
- Applicant: John Madocks , Patrick Lawrence Morse
- Applicant Address: US AZ Tucson
- Assignee: General Plasma, Inc.
- Current Assignee: General Plasma, Inc.
- Current Assignee Address: US AZ Tucson
- Agency: Blue Filament Law PLLC
- Agent Avery N. Goldstein
- International Application: PCT/US2008/066145 WO 20080606
- International Announcement: WO2008/154397 WO 20081218
- Main IPC: C23C14/00
- IPC: C23C14/00

Abstract:
A new and useful rotatable sputter magnetron assembly is provided, that addresses the issue of uneven wear of the target electrode tube. According to the principles of the present invention, a rotatable sputter magnetron assembly for use in magnetron sputtering target material onto a substrate comprises a. a longitudinally extending tubular shaped target electrode tube having a longitudinal central axis, b. the target electrode tube extending about a magnet bar that is configured to generate a plasma confining magnetic field adjacent the target electrode tube, c. the magnet bar being held substantially stationary within the target electrode tube, and d. the target electrode tube supported for rotation about its longitudinal central axis and for axial movement along its longitudinal central axis, so that wear of the target electrode tube can be controlled by moving the target electrode tube axially during magnetron sputtering of the target material.
Public/Granted literature
- US20100155226A1 ROTATABLE MAGNETRON SPUTTERING WITH AXIALLY MOVABLE TARGET ELECTRODE TUBE Public/Granted day:2010-06-24
Information query
IPC分类: