发明授权
- 专利标题： Inlaid optical material and method of manufacture
- 专利标题（中）： 镶嵌光学材料及其制造方法
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申请号： US12662237申请日： 2010-04-07
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公开(公告)号： US08541735B2公开(公告)日： 2013-09-24
- 发明人: John S. Foster , John C. Harley , Ian R. Johnston , Jeffery F. Summers
- 申请人： John S. Foster , John C. Harley , Ian R. Johnston , Jeffery F. Summers
- 申请人地址： US CA Goleta
- 专利权人： Innovative Micro Technology
- 当前专利权人： Innovative Micro Technology
- 当前专利权人地址： US CA Goleta
- 代理商 Jaquelin K. Spong
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; B29D11/00 ; H01J3/14 ; G01N21/00 ; G01N15/06
摘要：
An optical material is inlaid into a supporting substrate, with the top surface of the optical material flush with the top surface of the substrate, wherein the optical element is used to shape a beam of light travelling substantially parallel to the top surface of the substrate, but with the central axis of the beam below the top surface of the substrate. The optical elements serve to shape the beam of light for delivery to or from a microfabricated structure within the device.
公开/授权文献
- US20110250092A1 Inlaid optical material and method of manufacture 公开/授权日：2011-10-13
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