- 专利标题: Electroless deposition of platinum on copper
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申请号: US13333509申请日: 2011-12-21
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公开(公告)号: US08545998B2公开(公告)日: 2013-10-01
- 发明人: Bob Kong , Igor Ivanov , Zhi-Wen Sun , Jinhong Tong
- 申请人: Bob Kong , Igor Ivanov , Zhi-Wen Sun , Jinhong Tong
- 申请人地址: US CA San Jose
- 专利权人: Intermolecular, Inc.
- 当前专利权人: Intermolecular, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: B32B9/00
- IPC分类号: B32B9/00 ; B32B19/00 ; H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
Embodiments of the current invention describe a method of plating platinum selectively on a copper film using a self-initiated electroless process. In particular, platinum films are plated onto very thin copper films having a thickness of less than 300 angstroms. The electroless plating solution and the resulting structure are also described. This process has applications in the semiconductor processing of logic devices, memory devices, and photovoltaic devices.
公开/授权文献
- US20120091590A1 Electroless Deposition of Platinum on Copper 公开/授权日:2012-04-19
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