发明授权
US08546193B2 Semiconductor device and method of forming penetrable film encapsulant around semiconductor die and interconnect structure
有权
在半导体芯片和互连结构周围形成可穿透膜密封剂的半导体器件和方法
- 专利标题: Semiconductor device and method of forming penetrable film encapsulant around semiconductor die and interconnect structure
- 专利标题(中): 在半导体芯片和互连结构周围形成可穿透膜密封剂的半导体器件和方法
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申请号: US12917629申请日: 2010-11-02
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公开(公告)号: US08546193B2公开(公告)日: 2013-10-01
- 发明人: Byung Tai Do , Reza A. Pagaila , Linda Pei Ee Chua
- 申请人: Byung Tai Do , Reza A. Pagaila , Linda Pei Ee Chua
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins & Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L21/98 ; H01L23/31
摘要:
A semiconductor device has a plurality of bumps formed over a carrier. A semiconductor die is mounted to the carrier between the bumps. A penetrable film encapsulant layer having a base layer, first adhesive layer, and second adhesive layer is placed over the semiconductor die and bumps. The penetrable film encapsulant layer is pressed over the semiconductor die and bumps to embed the semiconductor die and bumps within the first and second adhesive layers. The first adhesive layer and second adhesive layer are separated to remove the base layer and first adhesive layer and leave the second adhesive layer around the semiconductor die and bumps. The bumps are exposed from the second adhesive layer. The carrier is removed. An interconnect structure is formed over the semiconductor die and second adhesive layer. A conductive layer is formed over the second adhesive layer electrically connected to the bumps.
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