Invention Grant
- Patent Title: Biosensors integrated with a microfluidic structure
- Patent Title (中): 与微流体结构集成的生物传感器
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Application No.: US13293795Application Date: 2011-11-10
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Publication No.: US08551859B2Publication Date: 2013-10-08
- Inventor: Kristin M. Ackerson , John J. Ellis-Monaghan , Jeffrey P. Gambino , Yen L. Lim
- Applicant: Kristin M. Ackerson , John J. Ellis-Monaghan , Jeffrey P. Gambino , Yen L. Lim
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Michael Le Strange
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/70

Abstract:
A biosensor with a microfluidic structure surrounded by an electrode and methods of forming the electrode around the microfluidic structure of the biosensor are provided. A method includes forming a gate or electrode in a first layer. The method further includes forming a trench in a second layer. The method further includes forming a first metal layer in the trench such that the first metal layer is in electrical contact with the gate or the electrode. The method further includes forming a sacrificial material in the trench. The method further includes forming a second metal layer over the sacrificial material and in contact with the first metal layer. The method further includes removing the sacrificial material such that a microfluidic channel is formed surrounded by the first and the second metal layers.
Public/Granted literature
- US20130119440A1 BIOSENSORS INTEGRATED WITH A MICROFLUIDIC STRUCTURE Public/Granted day:2013-05-16
Information query
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