发明授权
- 专利标题: Methods for forming three-dimensional memory devices, and related structures
- 专利标题(中): 形成三维记忆装置的方法及相关结构
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申请号: US13450960申请日: 2012-04-19
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公开(公告)号: US08552568B2公开(公告)日: 2013-10-08
- 发明人: Nishant Sinha , Krishna K. Parat
- 申请人: Nishant Sinha , Krishna K. Parat
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Traskbritt
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L21/44 ; H01L21/48 ; H01L21/50
摘要:
Methods of forming semiconductor devices that include one or more arrays of memory devices in a three-dimensional arrangement, such as those that include forming a conductive contact in a dielectric material overlying a memory array, wherein a wafer bonding and cleaving process may be utilized to provide a foundation material for forming another memory array having an active region in electrical contact with the conductive contact. Additionally, the conductive contact may be formed in a donor wafer, which in turn may be bonded to a dielectric material overlying a memory array using another wafer bonding process. Novel semiconductor devices and structures including the same may be formed using such methods.
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