Invention Grant
- Patent Title: Gas delivery system with voltage gradient for an ion microscope
- Patent Title (中): 带离子显微镜电压梯度的气体输送系统
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Application No.: US13276836Application Date: 2011-10-19
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Publication No.: US08558192B2Publication Date: 2013-10-15
- Inventor: Billy W. Ward , John Notte, IV , Randall G. Percival
- Applicant: Billy W. Ward , John Notte, IV , Randall G. Percival
- Applicant Address: US NY Thornwood
- Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee Address: US NY Thornwood
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/28
Abstract:
Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10−2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.
Public/Granted literature
- US20120145896A1 GAS DELIVERY IN A MICROSCOPE SYSTEM Public/Granted day:2012-06-14
Information query
