公开(公告)号：US11378532B2

公开(公告)日：2022-07-05

申请号：US17129686

申请日：2020-12-21

申请人： Carl Zeiss SMT GmbH ,  Carl Zeiss Microscopy, LLC

发明人： Brett Lewis ,  Wilhelm Kuehn ,  Deying Xia ,  Shawn McVey ,  Ulrich Mantz

IPC分类号： G01N23/2258 ,  H01J37/26 ,  H01J49/14 ,  H01L21/67

摘要： An inspection system serves to qualify semiconductor structures. The inspection system has an ion beam source for space-resolved exposition of the structures to be qualified with an ion beam. The inspection system also includes a secondary ion detection device with a mass spectrometer. The mass spectrometer is configured to measure an ion mass to charge ratio in a given bandwidth.

公开(公告)号：US10410828B2

公开(公告)日：2019-09-10

申请号：US14976162

申请日：2015-12-21

申请人： Carl Zeiss Microscopy, LLC

发明人： Chuong Huynh ,  Bernhard Goetze ,  John A. Notte, IV ,  Diane Stewart

IPC分类号： H01J37/304 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/305 ,  H01L39/24

摘要： Disclosed is a charged particle beam system comprising a charged particle beam column having a charged particle source forming a charged particle beam, an objective lens and a first deflection system for changing a position of impingement of the charged particle beam in a sample plane. The system further comprises a sample chamber comprising a sample stage for holding a sample to be processed, and a controller configured to create and store a height map of a sample surface. The controller is further configured to dynamically adjust the objective lens of the charged particle beam in dependence on a position of impingement of the charged particle beam according to the height map.

公开(公告)号：US09218935B2

公开(公告)日：2015-12-22

申请号：US14314289

申请日：2014-06-25

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  FHM-Faridur Rahman ,  Weijie Huang ,  Shawn McVey

IPC分类号： H01J27/26 ,  H01J37/08 ,  H01J37/18 ,  G21K5/04

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.

摘要翻译： 本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体 具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。 提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。

公开(公告)号：US09123502B2

公开(公告)日：2015-09-01

申请号：US13237426

申请日：2011-09-20

申请人： Billy W. Ward

发明人： Billy W. Ward

IPC分类号： H04N7/18 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J2237/22

摘要： In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.

摘要翻译： 通常，在一个方面，本公开的特征在于用于对样品成像的方法和系统，例如，带有带电粒子的成像样品。

公开(公告)号：US08669525B2

公开(公告)日：2014-03-11

申请号：US12997686

申请日：2009-05-26

申请人： Sybren Sijbrandij ,  John Notte, IV ,  William B. Thompson

发明人： Sybren Sijbrandij ,  John Notte, IV ,  William B. Thompson

IPC分类号： H01J37/26

CPC分类号： G01N23/2251 ,  G01N23/2208 ,  G01N23/2258 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0807 ,  H01J2237/2441 ,  H01J2237/2444 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/2803 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.

摘要翻译： 本公开涉及使用离子束显微镜的样品检查。 在一些实施例中，本公开涉及多个检测器的使用，每个检测器提供关于样品的不同信息。

公开(公告)号：US08558192B2

公开(公告)日：2013-10-15

申请号：US13276836

申请日：2011-10-19

申请人： Billy W. Ward ,  John Notte, IV ,  Randall G. Percival

发明人： Billy W. Ward ,  John Notte, IV ,  Randall G. Percival

IPC分类号： H01J37/08 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/038 ,  H01J2237/061 ,  H01J2237/0807

摘要： Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10−2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.

摘要翻译： 公开了用于向气体输送系统施加电压梯度的系统和方法，将气体输送通过具有电压梯度的气体输送系统的一段长度，气体的压力距离乘积小于约1×10 -2乇 或大于约100托/英寸，并将气体输送到离子显微镜的壳体中，该壳体包括发射器和提取器。

公开(公告)号：US08455840B2

公开(公告)日：2013-06-04

申请号：US13276879

申请日：2011-10-19

申请人： Lawrence Scipioni

发明人： Lawrence Scipioni

IPC分类号： H01J27/26 ,  H01J27/02 ,  H01J37/26 ,  H01J49/10

CPC分类号： H01J37/08 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/0453 ,  H01J2237/0653 ,  H01J2237/0802 ,  H01J2237/31732 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31749

摘要： The disclosure relates to ion beams systems, such as gas field ion microscopes, having multiple modes of operation, as well as related methods. In some embodiments, the disclosure provides a method of operating a gas field ion microscope system that includes a gas field ion source, where the gas field ion source includes a tip including a plurality of atoms.

摘要翻译： 本公开涉及具有多种操作模式的离子束系统，例如气体离子显微镜，以及相关方法。 在一些实施例中，本公开提供了一种操作包括气体离子源的气体场离子显微镜系统的方法，其中气体场离子源包括具有多个原子的尖端。

公开(公告)号：US09640364B2

公开(公告)日：2017-05-02

申请号：US14969352

申请日：2015-12-15

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  FHM-Faridur Rahman ,  Weijie Huang ,  Shawn McVey

IPC分类号： H01J37/08 ,  H01J37/18 ,  H01J27/26

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.

公开(公告)号：US09536699B2

公开(公告)日：2017-01-03

申请号：US14314317

申请日：2014-06-25

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  Weijie Huang ,  Raymond Hill ,  FHM-Faridur Rahman ,  Alexander Groholski ,  Shawn McVey

IPC分类号： H01J37/00 ,  H01J37/08 ,  G21K5/04 ,  H01J27/26 ,  H01J37/18

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.

摘要翻译： 本发明涉及一种具有枪壳体的气体离子源，连接到枪壳体的导电枪壳底座，安装在枪壳底座上的内管，内管由电隔离陶瓷制成， 连接到内管的导电尖端，安装到枪罐底座的外管，外管由电绝缘陶瓷制成，以及附接到外管的提取器电极。 提取器电极可以具有用于通过在导电末端附近产生的离子的开口。

公开(公告)号：US09218934B2

公开(公告)日：2015-12-22

申请号：US14314262

申请日：2014-06-25

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  Weijie Huang ,  FHM-Faridur Rahman ,  Shawn McVey

IPC分类号： H01J27/26 ,  H01J37/08 ,  H01J37/18 ,  G21K5/04

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.

摘要翻译： 本公开涉及一种操作气体场离子束系统的方法，其中气体场离子束系统包括外部壳体，布置在外部壳体内的内部壳体，布置在内部壳体内的导电尖端，气体源 用于将一个或多个气体供应到内部壳体，气体供应具有终止在内部壳体内的管，以及具有孔的提取器电极，其具有允许在尖端附近产生的离子通过孔进入外部壳体。 该方法包括将外部壳体，内部壳体，导电尖端，管子和提取器电极定期加热至高于100℃的温度。