发明授权
US08563418B2 Semiconductor device and method of forming vertically offset bond on trace interconnects on different height traces
有权
半导体器件和在不同高度迹线上的迹线互连上形成垂直偏移键的方法
- 专利标题: Semiconductor device and method of forming vertically offset bond on trace interconnects on different height traces
- 专利标题(中): 半导体器件和在不同高度迹线上的迹线互连上形成垂直偏移键的方法
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申请号: US13268091申请日: 2011-10-07
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公开(公告)号: US08563418B2公开(公告)日: 2013-10-22
- 发明人: Reza A. Pagaila , KiYoun Jang , HunTeak Lee
- 申请人: Reza A. Pagaila , KiYoun Jang , HunTeak Lee
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins & Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A method of making a semiconductor device includes providing a substrate, and forming a first conductive layer over the substrate. A patterned layer is formed over the first conductive layer. A second conductive layer is formed in the patterned layer. A height of the second conductive layer is greater than a height of the first conductive layer. The patterned layer is removed. A first bump and a second bump are formed over the first and second conductive layers, respectively, wherein the second bump overlaps the first bump, and wherein an uppermost surface of the second bump is vertically offset from an uppermost surface of the first bump. Bond wires are formed on the first and second bumps. The bond wires are arranged in a straight configuration. Lowermost surfaces of the first conductive layer and second conductive layer are substantially coplanar.
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