发明授权
- 专利标题: Accelerator on a chip having a grid and plate cell
- 专利标题(中): 具有栅格和板单元的芯片上的加速器
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申请号: US13585832申请日: 2012-08-15
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公开(公告)号: US08564225B1公开(公告)日: 2013-10-22
- 发明人: Kim L. Hailey , Robert O. Conn
- 申请人: Kim L. Hailey , Robert O. Conn
- 申请人地址: US CA Los Gatos
- 专利权人: Transmute, Inc.
- 当前专利权人: Transmute, Inc.
- 当前专利权人地址: US CA Los Gatos
- 代理机构: Imperium Patent Works
- 代理商 T. Lester Wallace
- 主分类号: H05H7/00
- IPC分类号: H05H7/00
摘要:
An accelerator assembly includes an acceleration channel that passes in a straight line through a plurality of accelerator cells. Each cell includes an acceleration region and a drift region. The drift region includes a high voltage plate and a grid electrode, where the grid electrode is disposed between the high voltage plate and the channel. In each cell, a large DC voltage is present on the high voltage plate. A voltage on the grid electrode is controlled such that at a first time an ion in the channel is attracted toward the high voltage plate, and such that at a second time the ion is shielded and is not attracted toward the high voltage plate. In one specific example, the assembly is part of a Direct Write On Wafer (DWOW) printing system that can direct write an image onto a 300 mm diameter wafer in one minute.
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