Invention Grant
- Patent Title: Integrated acoustic transducer in MEMS technology, and manufacturing process thereof
- Patent Title (中): MEMS技术中的集成声换能器及其制造工艺
-
Application No.: US12644846Application Date: 2009-12-22
-
Publication No.: US08565452B2Publication Date: 2013-10-22
- Inventor: Luca Coronato , Sarah Zerbini , Angelo Antonio Merassi
- Applicant: Luca Coronato , Sarah Zerbini , Angelo Antonio Merassi
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2008A0982 20081223
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R9/08 ; H04R11/04 ; H04R17/02 ; H04R19/04 ; H04R21/02 ; H04R1/00 ; H04R9/06 ; H04R11/02
Abstract:
A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.
Public/Granted literature
- US20100158280A1 INTEGRATED ACOUSTIC TRANSDUCER IN MEMS TECHNOLOGY, AND MANUFACTURING PROCESS THEREOF Public/Granted day:2010-06-24
Information query
