发明授权
- 专利标题: Nano thick Pt metallization layer
- 专利标题(中): 纳米厚Pt金属化层
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申请号: US13024219申请日: 2011-02-09
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公开(公告)号: US08569889B1公开(公告)日: 2013-10-29
- 发明人: Shiguo Zhang , Sandrio Elim , Ling Bao
- 申请人: Shiguo Zhang , Sandrio Elim , Ling Bao
- 申请人地址: US WA Vancouver
- 专利权人: nLIGHT Photonics Corporation
- 当前专利权人: nLIGHT Photonics Corporation
- 当前专利权人地址: US WA Vancouver
- 代理商 Ethan A. McGrath
- 主分类号: H01L23/485
- IPC分类号: H01L23/485
摘要:
A metallization layer for a semiconductor device includes a first layer made of Pt and having a thickness greater than or equal to 15 Å and less than or equal to 50 Å, and a second layer formed on the first layer and made of a plurality of metallic sub-layers such as Ti/Pt/Au. A semiconductor device fabricated from the metallization layer includes a semiconductor substrate having a top layer and mesa structure and corresponding surface for securing an insulating layer and a corresponding exposed surface, and wherein the metallization layer is deposited over the insulating layer and exposed surface. Methods for forming the metallization layer are also disclosed.
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