Invention Grant
- Patent Title: Multi-axis actuating apparatus
- Patent Title (中): 多轴致动装置
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Application No.: US13252842Application Date: 2011-10-04
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Publication No.: US08569932B2Publication Date: 2013-10-29
- Inventor: En-Te Hwu , Ing-Shouh Hwang
- Applicant: En-Te Hwu , Ing-Shouh Hwang
- Applicant Address: TW Taipei
- Assignee: Academia Sinica
- Current Assignee: Academia Sinica
- Current Assignee Address: TW Taipei
- Agency: Brinks Hofer Gilson & Lione
- Priority: TW100119673A 20110603
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A multi-axis actuating apparatus for a nano-positioning apparatus includes a movable element attached to a sample platform, a plurality of driving elements, and a plurality of actuators. The driving elements frictionally engage the movable element and are configured to selectively move the movable element along a first direction. The plurality of actuators move the plurality of driving elements when driving signals are applied to the plurality of actuators. Different driving signals may be applied to the plurality of actuators to cause different movement of the driving elements such that the movable element has different displacements in different directions along the plurality of driving elements. The movable element is titled due to the different displacements.
Public/Granted literature
- US20120306317A1 MULTI-AXIS ACTUATING APPARATUS Public/Granted day:2012-12-06
Information query
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