Invention Grant
US08576375B2 Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus
有权
光学构件保持装置,调整光学构件的位置的方法和曝光装置
- Patent Title: Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus
- Patent Title (中): 光学构件保持装置,调整光学构件的位置的方法和曝光装置
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Application No.: US12181849Application Date: 2008-07-29
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Publication No.: US08576375B2Publication Date: 2013-11-05
- Inventor: Jin Nishikawa
- Applicant: Jin Nishikawa
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2006-020576 20060130
- Main IPC: G03B27/70
- IPC: G03B27/70 ; G03B27/54 ; G02B7/182 ; G03F7/20

Abstract:
There is provided is an optical member-holding apparatus which can hold a plurality of optical members of two different optical systems, even when the optical members exist in a common barrel in a mixed manner, such that the relative positions between the optical members can be easily adjusted; and which holds a mirror in a projection optical system and a mirror in an illumination optical system and includes a barrel unit, an inner ring holding the mirror, a holding member holding the mirror, a support plate attached to the barrel unit, and a holding-supporting mechanism attached to the support plate and adjusting the relative position of the mirror to the mirror.
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