发明授权
- 专利标题: Apparatus for VHF impedance match tuning
- 专利标题(中): VHF阻抗匹配调谐装置
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申请号: US12511377申请日: 2009-07-29
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公开(公告)号: US08578879B2公开(公告)日: 2013-11-12
- 发明人: Kartik Ramaswamy , Hiroji Hanawa , Kenneth S. Collins , Lawrence Wong , Samer Banna , Andrew Nguyen
- 申请人: Kartik Ramaswamy , Hiroji Hanawa , Kenneth S. Collins , Lawrence Wong , Samer Banna , Andrew Nguyen
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Moser Taboada
- 代理商 Alan Taboada
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23F1/00 ; H01L21/306 ; H01P7/04 ; H01P7/06
摘要:
Embodiments of impedance matching networks are provided herein. In some embodiments, an impedance matching network may include a coaxial resonator having an inner and an outer conductor. A tuning capacitor may be provided for variably controlling a resonance frequency of the coaxial resonator. The tuning capacitor may be formed by a first tuning electrode and a second tuning electrode and an intervening dielectric, wherein the first tuning electrode is formed by a portion of the inner conductor. A load capacitor may be provided for variably coupling energy from the inner conductor to a load. The load capacitor may be formed by the inner conductor, an adjustable load electrode, and an intervening dielectric.
公开/授权文献
- US20110023780A1 APPARATUS FOR VHF IMPEDANCE MATCH TUNING 公开/授权日:2011-02-03
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