Invention Grant
- Patent Title: Method of manufacturing a field-effect transistor
- Patent Title (中): 制造场效应晶体管的方法
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Application No.: US13307069Application Date: 2011-11-30
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Publication No.: US08586462B2Publication Date: 2013-11-19
- Inventor: Hokyun Ahn , Jong-Won Lim , Hyung Sup Yoon , Byoung-Gue Min , Sang-Heung Lee , Hae Cheon Kim , Eun Soo Nam
- Applicant: Hokyun Ahn , Jong-Won Lim , Hyung Sup Yoon , Byoung-Gue Min , Sang-Heung Lee , Hae Cheon Kim , Eun Soo Nam
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2010-0130291 20101217
- Main IPC: H01L29/808
- IPC: H01L29/808 ; H01L21/283

Abstract:
Disclosed are a method of manufacturing a field-effect transistor. The disclosed method includes: providing a semiconductor substrate; forming a source ohmic metal layer on one side of the semiconductor substrate; forming a drain ohmic metal layer on another side of the semiconductor substrate; forming a gate electrode between the source ohmic metal layer and the drain ohmic metal layer, on an upper portion of the semiconductor substrate; forming an insulating film on the semiconductor substrate's upper portion including the source ohmic metal layer, the drain ohmic metal layer and the gate electrode; and forming a plurality of field electrodes on an upper portion of the insulating film, wherein the insulating film below the respective field electrodes has different thicknesses.
Public/Granted literature
- US20120153361A1 FIELD-EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-06-21
Information query
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