发明授权
US08588952B2 Substrate processing system, substrate processing method and storage medium
有权
基板处理系统,基板处理方法和存储介质
- 专利标题: Substrate processing system, substrate processing method and storage medium
- 专利标题(中): 基板处理系统,基板处理方法和存储介质
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申请号: US13008196申请日: 2011-01-18
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公开(公告)号: US08588952B2公开(公告)日: 2013-11-19
- 发明人: Kenichirou Matsuyama , Takeshi Matsumoto
- 申请人: Kenichirou Matsuyama , Takeshi Matsumoto
- 申请人地址: JP Minato-Ku
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Minato-Ku
- 代理机构: Burr & Brown
- 优先权: JP2010-039039 20100224
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A substrate processing system, which repeats a carrying cycle in which a substrate is carried sequentially in a carrying order indicated by module numbers assigned to the modules, respectively, from the module of a lower module number to that of a higher module number, and is capable of processing substrates at a high throughput even if some modules become unusable and, thereafter, become usable. A controller controls a carrier such that the carrier carries a substrate taken out from the module preceding a multimodule unit including a plurality of modules to the module nest in the carrying order to the module of the multimodule unit from which a substrate is carried out at time nearest to time when the substrate was carried out from the module preceding the multimodule.