Invention Grant
US08596122B2 Micromechanical component and method for operating a micromechanical component 有权
用于操作微机械部件的微机械部件和方法

  • Patent Title: Micromechanical component and method for operating a micromechanical component
  • Patent Title (中): 用于操作微机械部件的微机械部件和方法
  • Application No.: US12736609
    Application Date: 2009-04-01
  • Publication No.: US08596122B2
    Publication Date: 2013-12-03
  • Inventor: Johannes ClassenLars Tebje
  • Applicant: Johannes ClassenLars Tebje
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102008001442 20080429
  • International Application: PCT/EP2009/053860 WO 20090401
  • International Announcement: WO2009/132917 WO 20091105
  • Main IPC: G01P15/125
  • IPC: G01P15/125
Micromechanical component and method for operating a micromechanical component
Abstract:
A micromechanical component comprising a substrate, a seismic mass, and first and second detection means, the substrate having a main extension plane and the first detection means being provided for detection of a substantially translational first deflection of the seismic mass along a first direction substantially parallel to the main extension plane, and the second detection means further being provided for detection of a substantially rotational second deflection of the seismic mass about a first rotation axis parallel to a second direction substantially perpendicular to the main extension plane. The seismic mass can be embodied as an asymmetrical rocker, with the result that accelerations can be sensed as rotations. Detection can be accomplished via capacitive sensors.
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