Invention Grant
- Patent Title: X-ray transmission inspection apparatus and x-ray transmission inspection method
- Patent Title (中): X射线透射检查装置和X射线透射检查方法
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Application No.: US12932122Application Date: 2011-02-17
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Publication No.: US08596866B2Publication Date: 2013-12-03
- Inventor: Yoshiki Matoba
- Applicant: Yoshiki Matoba
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2010-058426 20100315
- Main IPC: A61B6/08
- IPC: A61B6/08

Abstract:
To prevent erroneous detection in detecting a foreign matter, which is caused by a change in distance between a sample and an X-ray detector, provided is an X-ray transmission inspection apparatus including an X-ray tube (11) that irradiates an inspection sample element with an X-ray, an X-ray detector (13) that detects a transmission X-ray when the X-ray is transmitted through a sample, an operation portion (17) that obtains a contrast image from a transmission image of a transmission X-ray, a sensor that calculates a distance between the sample and the detector, and a mechanism that adjusts the position of the X-ray detector, in which an X-ray transmission image is picked up while the distance between the sample and the X-ray detector is kept constant.
Public/Granted literature
- US20110222656A1 X-ray transmission inspection apparatus and x-ray transmission inspection method Public/Granted day:2011-09-15
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