公开(公告)号：US08596866B2

公开(公告)日：2013-12-03

申请号：US12932122

申请日：2011-02-17

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: A61B6/08

CPC classification number: G01N23/083

Abstract: To prevent erroneous detection in detecting a foreign matter, which is caused by a change in distance between a sample and an X-ray detector, provided is an X-ray transmission inspection apparatus including an X-ray tube (11) that irradiates an inspection sample element with an X-ray, an X-ray detector (13) that detects a transmission X-ray when the X-ray is transmitted through a sample, an operation portion (17) that obtains a contrast image from a transmission image of a transmission X-ray, a sensor that calculates a distance between the sample and the detector, and a mechanism that adjusts the position of the X-ray detector, in which an X-ray transmission image is picked up while the distance between the sample and the X-ray detector is kept constant.

Abstract translation: 为了防止检测由于样品和X射线检测器之间的距离的变化引起的异物的错误检测，提供了一种X射线透射检查装置，其包括：X射线管（11），其照射检查 具有X射线的采样元件，当通过样本透射X射线时检测透射X射线的X射线检测器（13），从透射图像的透射图像获得对比度图像的操作部（17） 透射X射线，计算样品和检测器之间的距离的传感器，以及调整X射线检测器的位置的机构，其中拾取X射线透射图像，同时样品之间的距离 并且X射线检测器保持恒定。

公开(公告)号：US08000439B2

公开(公告)日：2011-08-16

申请号：US12544572

申请日：2009-08-20

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/223 ,  G01N23/203

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information of the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a first observation system which optically observes a surface of the sample in order to determine the irradiation point, and a second observation system which has a smaller depth of field than the first observation system, optically observes a narrow region, and measures the distance from the determined irradiation point by focus adjustment are included.

Abstract translation: 将X射线照射到样品的照射点的X射线管，检测特征X射线的X射线检测器和从样本发射的散射X射线，并输出包含能量信息的信号 特征X射线和散射X射线，分析该信号的分析仪，第一观察系统，用于光学地观察样品的表面以确定照射点;以及第二观察系统，其具有较小的景深 与第一观察系统相比，光学地观察狭窄区域，并且通过焦点调整来测量与确定的照射点的距离。

公开(公告)号：US07680248B2

公开(公告)日：2010-03-16

申请号：US11972352

申请日：2008-01-10

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: H01J5/18

CPC classification number: H05G1/04 ,  H01J35/08 ,  H01J35/18 ,  H01J2235/087 ,  H01J2235/18

Abstract: To be able to achieve further small-sized formation and light-weighted formation and to promote a sensitivity by further efficiently detecting a fluorescent X-ray or the like in an X-ray tube and an X-ray analyzing apparatus, there are provided a vacuum cabinet 2 inside of which is brought into a vacuum state and which includes a window portion 1 formed by an X-ray transmitting film through which an X-ray can be transmitted, an electron beam source 3 installed at inside of the vacuum cabinet 2 for emitting an electron beam e, a target T generating a primary X-ray X1 by being irradiated with the electron beam e and installed at inside of the vacuum cabinet 2 to be able to emit the primary X-ray X1 to an outside sample S by way of the window portion 1, and an X-ray detecting element 4 arranged at inside of the vacuum cabinet 2 to be able to detect a fluorescent X-ray and a scattered X-ray X2 emitted from the sample S and incident from the window portion 1 for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray X2.

Abstract translation: 为了能够进一步小型化和轻量化形成，并且通过进一步有效地检测X射线管和X射线分析装置中的荧光X射线等来提高灵敏度， 其内部的真空柜2处于真空状态，并且包括由透射X射线的X射线透过膜形成的窗口部分1，安装在真空室2内部的电子束源3 用于发射电子束e，靶T通过照射电子束e并且安装在真空容器2的内部以能够将初级X射线X1发射到外部样品S产生主X射线X1 通过窗口部分1和布置在真空室2内部的X射线检测元件4，以便能够检测从样品S发射的荧光X射线和散射X射线X2，并从 窗口部分1用于输出包括的信号 g荧光X射线和散射X射线X的能量信息。

公开(公告)号：US07634054B2

公开(公告)日：2009-12-15

申请号：US12175768

申请日：2008-07-18

Applicant: Yoshiki Matoba ,  Yutaka Ikku

Inventor： Yoshiki Matoba ,  Yutaka Ikku

IPC: G01N23/223 ,  H01J35/18

CPC classification number: H01J35/18 ,  G01N23/223 ,  G01N2223/076 ,  H01J2235/087

Abstract: Provided are an X-ray tube and an X-ray analysis apparatus, which can be further reduced in size as well as in weight and more efficiently detect a fluorescent X-ray and the like to increase sensitivity. The X-ray tube includes: a vacuum casing (2) having an interior in a vacuum state and a window section (1) formed of an X-ray transmission film through which an X-ray can be transmitted; an electron beam source (3) provided in the vacuum casing (2), to emit an electron beam (e); a target (T) provided in the vacuum casing (2) to be irradiated with the electron beam (e) to generate a primary X-ray and to be able to emit the generated primary X-ray through the window section (1) to an exterior sample (S); an X-ray detection element (4) provided in the vacuum casing (2) to be able to detect a fluorescent X-ray and a scattered X-ray, which are emitted from the sample (S) to be incident through the window section (1), to output a signal containing energy information of the fluorescent X-ray and the scattered X-ray; and a metal guard member (10) provided between the X-ray detection element (4) and an irradiated area of the target (T) with the electron beam (e).

Abstract translation: 提供一种X射线管和X射线分析装置，能够进一步减小尺寸和重量，并且更有效地检测荧光X射线等以提高灵敏度。 X射线管包括：具有真空状态的真空壳体（2）和由能够透射X射线的X射线透射膜形成的窗口部分（1）; 设置在真空壳体（2）中的电子束源（3），以发射电子束（e）; 设置在所述真空壳体（2）中以照射所述电子束（e）以产生主X射线并能够通过所述窗口部分（1）发射所产生的初级X射线的目标（T）至 外部样品（S）; 设置在所述真空壳体（2）中的X射线检测元件（4），以能够检测从所述样品（S）射出的通过所述窗口部分入射的荧光X射线和散射X射线 （1），输出包含荧光X射线和散射X射线的能量信息的信号; 以及设置在所述X射线检测元件（4）与所述靶（T）的照射区域之间的电子束（e）的金属保护部件（10）。

公开(公告)号：US07634053B2

公开(公告)日：2009-12-15

申请号：US11708789

申请日：2007-02-20

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G01N2223/30

Abstract: There is provided a fluorescent X-ray analysis apparatus in which a detection lower limit is improved, and it is possible to quantify a trace aimed element having been contained not only in a sample whose main component is a heavy element but also in a sample whose main component is a light element. The fluorescent X-ray analysis apparatus possesses a sample base supporting the sample, an X-ray source irradiating a primary X-ray with a predetermined irradiation position being made a center, and a detector disposed toward the irradiation position and detecting a fluorescent X-ray generated from the sample. The sample base has a detachable sample holding tool fixing the sample while being approached to the X-ray source and the detector, and a measurement is possible by selectively disposing the sample in any one of a 1st inspection position in which an irradiated face is coincided with the irradiation position, or a 2nd inspection position in which the sample is fixed to the sample holding tool, an irradiated face is approached to the X-ray source, and an inspected face is approached to the detector.

Abstract translation: 提供了一种荧光X射线分析装置，其中检测下限得到改善，并且可以对不仅在主要成分是重元素的样品中含有的痕量目标元素进行定量，而且还可以定量 主要组件是轻元素。 荧光X射线分析装置具有支撑样品的样品基底，以预定照射位置为中心照射初级X射线的X射线源和朝向照射位置设置的检测器， 从样品中产生的光线。 样品基底具有可拆卸的样品保持工具，其在接近X射线源和检测器的同时固定样品，并且可以通过选择性地将样品放置在照射的面一致的第一检查位置中的任一个中来进行测量 或者将样品固定在样品保持工具上的第二检查位置，将照射面接近X射线源，将检查面靠近检测器。

公开(公告)号：US20090213996A1

公开(公告)日：2009-08-27

申请号：US12369062

申请日：2009-02-11

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: H05G1/00

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: Provided are an X-ray analysis apparatus and an X-ray analysis method, in which a measurer can judge an area incapable of being analyzed in a sample with a concave-convex portion. The X-ray analysis apparatus includes: an X-ray tubular bulb for irradiating an arbitrary irradiation point located on the sample with a radiation beam; an X-ray detector for detecting a characteristic X-ray and a scattered X-ray radiated from the sample and outputting a signal containing energy information on the characteristic X-ray and the scattered X-ray; a narrow-range illumination mechanism and a wide-range illumination mechanism for emitting an illumination light to the sample to illuminate the sample; and a narrow-range observation mechanism and a wide-range observation mechanism for obtaining an illumination image of the sample, which is illuminated with the illumination light, as image data, in which the narrow-range observation mechanism and the wide-range observation mechanism include a narrow-range oblique illumination section and a wide-range oblique illumination section, respectively, in which an optical axis of the illumination light at a time of the illuminating is set toward the irradiation point in the same direction as a direction linking the irradiation point with the X-ray detector at a time of the detecting.

Abstract translation: 提供了一种X射线分析装置和X射线分析方法，其中测量器可以判断在具有凹凸部分的样品中不能分析的区域。 X射线分析装置包括：X射线管状灯泡，用于用辐射束照射位于样品上的任意照射点; 用于检测从样本辐射的特征X射线和散射X射线的X射线检测器，并输出包含关于特征X射线和散射X射线的能量信息的信号; 窄范围照明机构和用于向样品发射照明光以照射样品的宽范围照明机构; 以及用于获得被照明光照射的样本的照明图像的窄范围观察机构和宽范围观察机构作为图像数据，其中窄范围观察机构和广范围观察机构 包括窄范围倾斜照明部分和宽范围倾斜照明部分，其中在照射时将照明时的照明光的光轴设置成与连接照射的方向相同的方向上的照射点 在检测时与X射线检测器指向。

公开(公告)号：US07022996B2

公开(公告)日：2006-04-04

申请号：US10443225

申请日：2003-05-22

Applicant: Yoshiki Matoba ,  Kazuhiko Kimura

Inventor： Yoshiki Matoba ,  Kazuhiko Kimura

IPC: G01T1/24

CPC classification number: G01T3/00 ,  G01T1/242 ,  G01T1/244

Abstract: In order to provide a radiation detector capable of implementing measurements with a good energy resolution and a high detection efficiency over a broad energy range using a single detector, in the present invention, a radiation detecting element composed of Si semiconductor and the radiation detecting element composed of CdZnTe or CdTe semiconductor are lined up as two layers longitudinally. The radiation detecting element composed of Si semiconductor is taken as a first layer at the side of incidence of the radiation and the radiation detecting element composed of CdZnTe or CdTe semiconductor is taken as a second layer.

公开(公告)号：US20110222656A1

公开(公告)日：2011-09-15

申请号：US12932122

申请日：2011-02-17

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/04

CPC classification number: G01N23/083

Abstract: To prevent erroneous detection in detecting a foreign matter, which is caused by a change in distance between a sample and an X-ray detector, provided is an X-ray transmission inspection apparatus including an X-ray tube (11) that irradiates an inspection sample element with an X-ray, an X-ray detector (13) that detects a transmission X-ray when the X-ray is transmitted through a sample, an operation portion (17) that obtains a contrast image from a transmission image of a transmission X-ray, a sensor that calculates a distance between the sample and the detector, and a mechanism that adjusts the position of the X-ray detector, in which an X-ray transmission image is picked up while the distance between the sample and the X-ray detector is kept constant.

Abstract translation: 为了防止检测由于样品和X射线检测器之间的距离的变化引起的异物的错误检测，提供了一种X射线透射检查装置，其包括：X射线管（11），其照射检查 具有X射线的采样元件，当通过样本透射X射线时检测透射X射线的X射线检测器（13），从透射图像的透射图像获得对比度图像的操作部（17） 透射X射线，计算样品和检测器之间的距离的传感器，以及调整X射线检测器的位置的机构，其中拾取X射线透射图像，同时样品之间的距离 并且X射线检测器保持恒定。

公开(公告)号：US20090041196A1

公开(公告)日：2009-02-12

申请号：US12175768

申请日：2008-07-18

Applicant: Yoshiki Matoba ,  Yutaka Ikku

Inventor： Yoshiki Matoba ,  Yutaka Ikku

IPC: G01N23/223 ,  H01J5/18

CPC classification number: H01J35/18 ,  G01N23/223 ,  G01N2223/076 ,  H01J2235/087

Abstract: Provided are an X-ray tube and an X-ray analysis apparatus, which can be further reduced in size as well as in weight and more efficiently detect a fluorescent X-ray and the like to increase sensitivity. The X-ray tube includes: a vacuum casing (2) having an interior in a vacuum state and a window section (1) formed of an X-ray transmission film through which an X-ray can be transmitted; an electron beam source (3) provided in the vacuum casing (2), to emit an electron beam (e); a target (T) provided in the vacuum casing (2) to be irradiated with the electron beam (e) to generate a primary X-ray and to be able to emit the generated primary X-ray through the window section (1) to an exterior sample (S); an X-ray detection element (4) provided in the vacuum casing (2) to be able to detect a fluorescent X-ray and a scattered X-ray, which are emitted from the sample (S) to be incident through the window section (1), to output a signal containing energy information of the fluorescent X-ray and the scattered X-ray; and a metal guard member (10) provided between the X-ray detection element (4) and an irradiated area of the target (T) with the electron beam (e).

Abstract translation: 提供一种X射线管和X射线分析装置，能够进一步减小尺寸和重量，并且更有效地检测荧光X射线等以提高灵敏度。 X射线管包括：具有真空状态的真空壳体（2）和由能够透射X射线的X射线透射膜形成的窗口部分（1）; 设置在真空壳体（2）中的电子束源（3），以发射电子束（e）; 设置在所述真空壳体（2）中以照射所述电子束（e）以产生主X射线并能够通过所述窗口部分（1）发射所产生的初级X射线的目标（T）至 外部样品（S）; 设置在所述真空壳体（2）中的X射线检测元件（4），以能够检测从所述样品（S）射出的通过所述窗口部分入射的荧光X射线和散射X射线 （1），输出包含荧光X射线和散射X射线的能量信息的信号; 以及设置在所述X射线检测元件（4）与所述靶（T）的照射区域之间的电子束（e）的金属保护部件（10）。

公开(公告)号：US20090028297A1

公开(公告)日：2009-01-29

申请号：US12175743

申请日：2008-07-18

Applicant: Yoshiki Matoba ,  Yutaka Ikku

Inventor： Yoshiki Matoba ,  Yutaka Ikku

IPC: H01J5/18 ,  G01D18/00

CPC classification number: H01J35/08 ,  H01J35/12 ,  H01J35/18 ,  H01J2235/087 ,  H01J2235/1291

Abstract: There are disclosed an X-ray tube and an X-ray analysis apparatus which are made smaller and lighter in weight than heretofore and which detect fluorescent X-rays more efficiently with enhanced sensitivity. The X-ray tube has a vacuum enclosure, an electron beam source mounted in the enclosure and emitting an electron beam, a target irradiated with the beam and producing primary X-rays, an X-ray detector device, and a metallic thermal and electrical conductor portion mounted over a part of the window and extending from the target to the enclosure. The enclosure has a vacuum inside and a window made of an X-ray transmissive film through which X-rays are transmitted. The target is smaller in outside diameter than the window and mounted over the central portion of the window such that the primary X-rays can be ejected at an external sample through the window. The detector device is disposed in the enclosure such that it can detect the fluorescent and scattering X-rays entering from the window after being released from the sample. The detector device outputs a signal carrying information about the energies of the fluorescent and scattering X-rays.

Abstract translation: 公开了一种X射线管和X射线分析装置，它们的重量比以前更小和更轻，并且以更高的灵敏度更有效地检测荧光X射线。 X射线管具有真空外壳，电子束源安装在外壳中并发射电子束，用束照射的靶并产生初级X射线，X射线检测器装置和金属热电学 导体部分安装在窗口的一部分上并且从目标延伸到外壳。 外壳具有内部的真空和由透射X射线的X射线透射膜构成的窗口。 目标的外径比窗口小，并且安装在窗口的中心部分上，使得主X射线可以通过窗口在外部样品上喷射。 检测器装置设置在外壳中，使得其可以在从样品释放之后检测从窗口进入的荧光和散射X射线。 检测器装置输出携带有关荧光和散射X射线能量信息的信号。