Invention Grant
- Patent Title: Heat dissipation structure of SOI field effect transistor
- Patent Title (中): SOI场效应晶体管的散热结构
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Application No.: US13582624Application Date: 2011-08-17
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Publication No.: US08598636B2Publication Date: 2013-12-03
- Inventor: Ru Huang , Xin Huang , Shoubin Xue , Yujie Ai
- Applicant: Ru Huang , Xin Huang , Shoubin Xue , Yujie Ai
- Applicant Address: CN Beijing
- Assignee: Peking University
- Current Assignee: Peking University
- Current Assignee Address: CN Beijing
- Agency: Bozicevic, Field & Francis LLP
- Agent Bret E. Field
- Priority: CN201010259659 20100823
- International Application: PCT/CN2011/078507 WO 20110817
- International Announcement: WO2012/025025 WO 20120301
- Main IPC: H01L29/80
- IPC: H01L29/80

Abstract:
The present invention discloses a heat dissipation structure for a SOI field effect transistor having a schottky source/drain, which relates to a field of microelectronics. The heat dissipation structure includes two holes connected with a drain terminal or with both a source terminal and a drain terminal, which are filled with an N-type material with high thermoelectric coefficient and a P-type material with high thermoelectric coefficient respectively. A metal wire for the N-type material with high thermoelectric coefficient in the vicinity of the drain terminal is applied a high potential with respect to the drain terminal, and a metal wire for the P-type material with high thermoelectric coefficient in the vicinity of the drain terminal is applied a low potential with respect to the drain terminal. A metal wire for the N-type material with high thermoelectric coefficient in the vicinity of the source terminal is applied a high potential with respect to the source terminal, and a metal wire for the P-type material in the vicinity of the source terminal is applied a lower potential with respect to the source terminal. By way of a Peltier effect, in the present invention heat can be absorbed at a contact portion between the thermoelectric material and the source/drain, and at the same time dissipated at a connection portion between the thermoelectric material and a bottom electrode metal, so that the heat generated in an active region of the device is effectively transferred to the substrate and dissipated through a heat sink.
Public/Granted literature
- US20130001655A1 Heat Dissipation Structure of SOI Field Effect Transistor Public/Granted day:2013-01-03
Information query
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